What is the effect of the contamination of the cathode surface of the multi-arc cathode ion coater?(multi arc magnetron sputtering coating machine)
We have done such an experiment on the cold cathode arc of the multi-arc cathode ion coater. Under the same discharge conditions of the multi-arc cathode (such as the same arc ignition voltage, the same working atmosphere and the same vacuum, etc.), the surface is very A clean ion-coated cathode (such as a cathode that has been burned) is more difficult to start an arc, but a multi-arc cathode with a pollution on the surface (such as a dirt coated on the surface of the cathode) is easy to start an arc.
Obviously, when the surface of the cathode of the multi-arc cathodic ion coater is contaminated, it is more likely to produce surface electron emission. Generally speaking, the dirt itself contains a variety of components, and some elements are easy to emit electrons. On the other hand, the reduced work function of electrons on the contaminated cathode surface is also easier to produce electron emission. The cathode target source of multi-arc equipment (especially new targets) usually contains initial pollution (such as adsorbed oxygen, etc.). Since oxygen can emit a large amount of electrons, the initial arc is more likely to occur in polluted places until the surface pollution is evaporated. After that, normal target evaporation begins.
Therefore, during the assembly process of the target source of the multi-arc cathodic ion coating machine, ensure that the assembly is carried out in a clean state, and try to make the surface of the multi-arc cathode target, especially the non-evaporating surface such as the side surface, the cathode seat, and the shield, free from contamination. , To prevent arc discharge on the non-evaporating surface, and improve the stability and reliability of the target source. In addition, a large number of small holes on the surface of the cathode will cause serious interference to the arc combustion stability.
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