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What is the composition of the multifunctional vacuum coating equipment

What is the composition of the multifunctional vacuum coating equipment

2022-05-21

What is the composition of the multifunctional vacuum coating equipment





The multi-function vacuum coating machine is a combination of magnetron sputtering, arc ion and evaporation coating. It is a cylindrical target, target or flat magnetron device based on the multi-arc ion coating machine. It is fast and has the advantages of magnetron sputtering with low temperature, safety and suitable for various composite coatings.


The advantages of the multifunctional vacuum coating machine are as follows:


(1) Evaporation and magnetron sputtering mixing equipment: multifunctional, suitable for mass production and strong adaptability.


(2) Mixed use of magnetron sputtering and multi-arc ion plating: multi-arc can improve the quality of shelling and cleaning, and increase the bonding force between the film and the substrate. Combined with magnetron sputtering, composite films can be produced (high-energy ion source cleaning and activation, fast film formation).


(3) Mixed application of multiple pairs of magnetron sputtering targets and cylindrical arc ion plating: if the target material is relatively stable (such as Al), the ionization rate is high, the accumulation rate is fast, and the film formation is uniform. Such as reactive sputtering, such as plating SiO2, TiO2, together with multiple layers of different raw materials to make thin films.


(4) Mixed use of Rf, DC, if, and column arc: Rf can be directly coated with SiO2/Ag/SiO2 insulating film


(5) Mixed use of columnar arc, intermediate frequency and multi-arc: the columnar arc jointly ensures high ionization rate, reduces the proportion of large particle accumulation, and achieves the effect of good binding force and good surface finish. The multifunctional vacuum coating machine is suitable for high-end items, such as watch straps, watch cases, frames, mobile phone cases, golf balls, bathrooms, jewelry, etc.

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