The vacuum valve plays an important role in the air flow adjustment and the cut-off or connection of the pipeline in the vacuum coating machine. There are many types of valves for vacuum coating machines. We can classify them according to the transmission principle, working characteristics, connection method, specific use and other methods of vacuum valves. In terms of structure, there are mainly throttle valves, air release valves, combination valves, and isolation. Valve and other general structure. Next, learn about the specific types of domestic vacuum valves:
1. Vacuum flap valve
The high-vacuum pneumatic flap valve is a kind of compressed air as the power to change the direction of piston movement, thereby driving the valve plate to start, realizing the conduction and cut-off of the gas in the vacuum system or pipeline. This type of valve structure is relatively simple, opens and closes quickly, and can be adapted to automatic control systems. It is now used in electronics, food, metallurgy, biomedicine, atomic energy, aerospace, chemical and other medium and large equipment (such as vacuum coating equipment, vacuum furnace, vacuum Freeze drying equipment) and other wide applications.
2. Vacuum fine-tuning valve
The vacuum fine-tuning valve is also called the vacuum needle valve. It is a kind of screw drive to adjust the gap length between the tapered needle and the hole to change the valve seat conductance value, which can adjust the gas flow of the flow device and control the vacuum degree of the vacuum chamber.
3. Electromagnetic inflation pressure difference vacuum valve
The electromagnetic charging pressure difference valve is a valve specially installed on the air inlet of the mechanical vacuum pump. When the vacuum pump stops pumping, the valve plate will fall through the atmospheric pressure to close the vacuum system, and then use the valve air inlet to fill the pump cavity Into the atmosphere, it plays a role in preventing the backflow of mechanical vacuum pump oil from polluting the vacuum system, and can also maintain the vacuum of the vacuum system. It is a relatively novel vacuum valve.
4. Solenoid vacuum valve
The opening or closing of this type of vacuum valve is achieved by the magnetic force of the magnetic field and the spring return force. It has two types: normally closed and normally open. The most commonly used type is the normally closed type when it is not energized. In the event of a power failure, the valve will automatically close, preventing a large amount of air from entering the vacuum chamber.
5. Vacuum butterfly valve
High vacuum butterfly valves have four categories: manual butterfly valves, pneumatic butterfly valves, electric butterfly valves and regulating butterfly valves used to adjust the air flow of the vacuum system. This type of vacuum valve is connected or cut off by the 90° rotation of the valve plate. Compared with other valves, it has the advantages of fast opening and closing, small size, and is widely used in vacuum pipes and pumping pipes in vacuum equipment.
6. High vacuum flapper valve
There are three common types of ultra-high flapper valves: manual flapper valves, pneumatic flapper valves and electric flapper valves, which are suitable for cutting off or connecting airflow in ultra-high vacuum systems with clean air and non-corrosive gases as the medium. The valve body material is stainless steel. The vacuum valve can be installed in any direction and can withstand a certain pressure.
7. Vacuum flapper valve
The vacuum flapper valve can be used as an opening and closing system in a vacuum system, and is suitable for use in an environment with air and non-corrosive gas as the medium. Thread structure or flat cam structure is the main transmission component. The operation is light, reliable, and suitable for the temperature range of -30ºC-150ºC.
8. Diaphragm vacuum valve
This type of vacuum valve is a valve type that presses the rubber membrane on the valve seat through the valve stem to connect or cut off the vacuum system. The diaphragm valve body is cast with aluminum alloy, which is light in weight, small in size, simple in structure and good in sealing performance. Using fluorine rubber diaphragm material, its adaptable temperature range is -30ºC-150ºC, which can be applied to high vacuum system; if nitrile rubber diaphragm material is used, it can be applied to the pipeline for rough extraction of the previous stage (temperature then -25ºC- 80ºC range) non-corrosive gas.
9. Vacuum ball valve
There are three types of vacuum ball valves: electric, pneumatic and manual. Like the above-mentioned vacuum butterfly valve, it is a vacuum valve that can be turned on and off by only rotating 90º. The vacuum ball valve switches quickly, but has a larger volume and leakage rate than the vacuum butterfly valve. The applicable medium is wide, mainly water, acid, alkali, air, steam, etc.
10. Other vacuum valves
(1) Vacuum angle valve
It is used as a supporting element for the backing pump in low, high and ultra-high vacuum systems. Stainless steel is used as the valve body, and the bellows seal is used as the valve transmission seal, which solves the problem of air leakage in the movement of the transmission rod.
(2) Globe valve
The all-metal ultra-high vacuum globe valve adopts metal sealing, high-temperature baking resistance, and is widely used in ultra-high vacuum systems. It is convenient to replace the sealing head, each side of the valve plate can be directly exposed to the atmosphere, and the other side can still maintain ultra-high vacuum. It can also be used in low-pressure pipelines working at high or low temperatures. The switch can be used more than 1000 times.
(3) Check valve
The check valve is a normally closed vacuum valve, which has the advantages of simple operation, fast connection, small size, and good sealing performance. It is widely used in industrial fields such as vacuum equipment, electric power, chemical industry, and aerospace.
The basic requirements of vacuum coating machines for vacuum valves are: sufficient flow, long life, reliable sealing, easy to clean and install, good abrasion resistance of the sealing parts, simple operation, repeated use, etc. For the throttle valve, the air flow is evenly adjusted. Functional requirements. In addition, in the ultra-high vacuum coating system, the vacuum valve is also required to withstand 450ºC baking.
PVD vacuum coating machine/PVD vacuum coating machine
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