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What are the requirements of the PVD vacuum coating process for the application environment?

What are the requirements of the PVD vacuum coating process for the application environment?


What are the requirements of the PVD vacuum coating process for the application environment


The vacuum coating process has strict requirements on the application environment. For conventional vacuum processes, it mainly requires vacuum sanitation: there are no accumulated pollution sources on the parts or surfaces of the equipment in the vacuum, and the vacuum chamber surface is smooth and free of soft tissues. Pores and dead spaces, welding seams in vacuum equipment will not affect the vacuum, high vacuum equipment must not use oil as a lubricant, oil-free ultra-high vacuum systems should avoid the impact of oil vapor on the purity, working performance or surface characteristics of the working medium , Ultra-high vacuum metal systems often use 1Cr18Ni9Ti as the structural material, and the laboratory or workshop where the vacuum coating equipment is placed should be kept clean and sanitary.


During the vacuum coating process, the surface cleaning of the plated parts is very important. Basically, all the substrates must go through the pre-plating cleaning process before being loaded into the coating vacuum chamber to achieve degreasing, decontamination and dehydration of the workpiece.


The main sources of surface contamination of plated parts are: dust, sweat, grease, polishing paste, engine oil and lubricating oil will adhere to the processes such as processing, transmission, and packaging; gas adsorbed and absorbed on the surface of equipment parts; coating in humid air The oxide film formed on the surface of the machine parts. For pollution from these sources, most of the pollutants can be removed by degreasing or chemical cleaning methods.


Do not store clean workpieces that have been cleaned in an atmospheric environment. In order to reduce dust contamination and clean the storage of workpieces, cleaning cabinets or closed containers are often used. The glass substrate is stored in a freshly oxidized aluminum container to reduce the adsorption of hydrocarbon vapors. Because the freshly oxidized aluminum container will preferentially adsorb hydrocarbons. Surfaces that are sensitive to water vapor or highly unstable are usually stored in a vacuum drying oven.


The basic requirements of the vacuum coating process on the environment mainly include: a high degree of cleanliness in the vacuum chamber, a clean work room, and dust in the coating chamber. The air humidity in some areas is relatively high. Therefore, not only the substrate and the parts in the vacuum chamber must be cleaned, but also the baking and degassing work must be done before plating. In addition, in order to prevent oil from being brought into the vacuum chamber, it is necessary to pay attention to measures such as oil return and oil blocking of the oil diffusion pump.

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