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What are the methods for vacuum ion coating machine to find the location of the leak?

What are the methods for vacuum ion coating machine to find the location of the leak?

2020-09-07

What are the methods for vacuum ion coating machine to find the location of the leak?

 PVD vacuum coating machine

There are two basic methods for vacuum ion coating machine to find out the position of the leak, which are the inner probe method and the outer probe method (namely, the spray method and the nozzle method). When the probe element of the leak detection device is not connected with the tested equipment component, it is called the suction nozzle method or the outer probe method, and when it is connected, it called the injection method or the inner probe method.

 

The applicable scope and detection methods of the inner probe method and the outer probe method are as follows:

 

1. External probe method

 

This method is suitable for the cases where the tested parts are not allowed to be vacuumed, the tested equipment parts must be leak tested under pressure greater than atmospheric pressure, the tested equipment parts have a large amount of air out, and the tested equipment parts are some complicated long pipelines, etc. Under use.

 

As long as the leak-indicating substance is filled inside the component and the method of checking the leak-indicating substance leaking out from the leak hole, it belongs to the external probe method. Therefore, this method can choose the following devices and methods: mass spectrometry leak detector, halogen leak detector, ammonia leak detection method, fluorescence method, ultrasonic method, bubble method, etc.

 

2. Internal probe method

 

The internal probe method is suitable for leak detection of systems and parts that can be evacuated by the vacuum coating machine. Applying the leaking liquid to the suspicious place or spraying the suspicious place through the leaking gas are all internal probe methods.

 

When the device uses the internal probe method to determine the location of the leak, first consider whether there are detectors such as residual gas analysis mass spectrometers, vacuum gauges, etc., which can be used as leak detection, and whether high-frequency sparks can be used. Leak detector, etc.

 

Then consider choosing one of the methods or devices such as helium mass spectrometer leak detector, hydrogen-palladium method, discharge tube method, halogen leak detector, and regulatory method.

 

The leak detection rate of the inner probe method is faster than that of the suction nozzle method, but the outer probe method can make the pressure difference between the two sides of the tested equipment part higher than 100kPa, thus facilitating the detection of smaller leaks. Therefore, how to correctly select the leak detection device, leak detection method and leak indicator material of the vacuum ion coating machine is a major point of vacuum leak detection. The equipment leak detection personnel must carefully and correctly select the leak detection device, leak detection method and leak display material before the leak detection, in order to ensure the completion of the vacuum equipment leak detection work "fast, more, better, and economical".


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