What are the factors affecting the stability of PVD multiple-arc ion coating equipment（pvd vacuum coating equipment）?
The discharge of the cathodic arc target in the vacuum multiple-arc ion coating equipment is generally 60-120A or higher working current, about 20V working voltage, there is a concentrated arc current on the cathodic arc spot on the target surface, of which the spot occupies a small area , Has a high current density. In the absence of an external magnetic field, the cathode arc spot moves irregularly on the target surface, which can reach a speed of several meters per second. Because this movement is irregular, if the spot moves outside the evaporation surface, it may cause Extinguish the arc, damage the device and contaminate the ion plating layer. How to make the evaporation source/arc target of the equipment work stably and improve the working performance of the evaporation source/arc target is extremely important for improving the overall level of the pvd vacuum coating equipment and improving the quality of the vacuum ion coating film.
The stability of the target pvd vacuum multiple-arc ion coating equipment. Many scientific and technological workers have carried out a lot of experimental research work, published many papers, and proposed some methods to improve the stability of arc combustion. H. Wroe recommends using a magnetic field to limit the movement of the cathode arc spot; LPSablev has proposed the use of gap shielding and some feedback mechanisms to improve the stability of the arc; CF Morrison.Jr. uses an arc limiting ring to limit the movement of the arc spot from the evaporation surface. Ways to maintain the normal combustion of the arc.
Through sufficient experimental research results, it is found that the stability of the target arc discharge of the pvd vacuum multiple-arc ion coating equipment is related to many cases. The most significant effect is the effect of the magnetic field on the stability of the ion plating arc combustion; at the same time, the cleanliness, geometry and surface state of the cathode surface, the geometric size of the cathode target surface, the size of the arc current, the surface temperature of the cathode target surface, and the vacuum The vacuum degree in the coating chamber and the type of ambient atmosphere have different effects on the stability of the arc combustion of the multi-arc target.
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