What are the characteristics of multi-layer insulation of high vacuum PVD coating equipment？
The multilayer insulation of the high vacuum coating machine is also called super insulation. It is made of paper, nylon mesh, cloth, etc. (the material with low thermal conductivity and reflective screen) made of multi-layer glass fiber made of multilayer aluminum foil or aluminized polyester film (high reflectivity foil) in a high vacuum container. Hot objects are stacked on top of each other.
So far, it still has the advantages of small size, the best thermal insulation effect, light weight, and the lowest apparent thermal conductivity. This kind of insulation has been widely used in various high-vacuum coating equipment, cryogenic storage tanks, cryostats, space vehicles, cryogenic transportation pipelines, superconducting motors, refrigerators, and superconducting cables.
Only when the heat transfer of gas molecules is eliminated in the thermal insulation layer can the lowest apparent thermal conductivity of the multilayer thermal insulation of the high vacuum coating machine be achieved. When the pressure in the insulating layer is already less than 10-2Pa, further reducing the pressure has no obvious effect on the apparent thermal conductivity, so the required working vacuum is 10-2Pa~10-3Pa.
In the multi-layer insulated liquid nitrogen, liquid hydrogen, liquid oxygen, liquid nitrogen and other cryogenic containers of the high vacuum coating machine, it is necessary to maintain a high vacuum of 10-2Pa~10-3Pa during the use period of 5 or even 10 years. A series of technical measures such as thorough extraction and the use of low-temperature adsorbents (molecular sieve activated carbon) with good suction performance must be carried out. In order to overcome the disadvantages of multi-layer insulation of high-vacuum coating equipment such as complex process, high cost, long production cycle and high apparent thermal conductivity of the project, it is necessary to develop the multi-layer insulation exhaust process and interlayer pressure distribution of the high-vacuum coating machine , Research work such as adsorbent activation process and adsorbent gas absorption performance test.
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