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What are the applications of PVD vacuum coating equipment in electronic products?

What are the applications of PVD vacuum coating equipment in electronic products?

2021-02-20

What are the applications of PVD vacuum coating equipment in electronic products

 

The application of thin-film manufacturing technology in electronic products mainly includes integrated circuit and semiconductor coating, coating of various display elements, electronic tubes and sensors. The coating of semiconductors and various display elements has been introduced before. This article mainly describes the application of PVD vacuum coating equipment in the field of electronic tubes and sensors.

 

1. Electronic tube

 

Camera tube, used in TV, camera.

 

1. The photoconductive surface, the coating target material is CdS₃, Se-As-Te, ZnSe, PbO, and the film is formed by evaporation coating machine process.

 

2. Transparent conductive film, the coating target is SnO, In₂O₃, and the film is formed by evaporation or sputtering coating machine process.

 

3. Electrode, the coating target material is Cr, Cu (Au), and the film is formed by evaporation coating process.

 

Second, the sensor

 

1. Josephson devices are used in supercomputers.

 

(1) Josephson bonding, the coating target is PbO+In₂O, Pb, Nb, NbN, V₃Si, and the film is formed by evaporation or sputtering coating process.

 

(2) Insulating film, the coating target is SiO₂, SiO, and the film is formed by evaporation or sputtering coating process.

 

(3) Electrode, the coating target material is Au+Pb+In, Pb+Au+Pb, and the film is formed by evaporation coating process.

 

2. Magnetic bubble, used in computer memory.

 

(1) Sensor (bubble), the coating target is Fe-Ni, and the film is formed by evaporation or sputtering coating process.

 

(2) Insulating film, the coating target is Al-Cu, and the film is formed by evaporation coating process.

 

(3) Electrode, the coating target is SiO₂, which is formed by sputtering coating process.

 

3. Disk, used in computer storage.

 

The sensor, the coating target material is Fe, CO, Fe₂O₃, Fe₃O₄, and the film is formed by evaporation or sputtering coating process.


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