vacuum evaporation coating method

by:ZHENHUA     2020-04-07
Use high melting point metals such as ta, mo, tungsten to make a suitable shape of the steam source, load on the material to be evaporated, so that the air flows through. . .
Using ta, mo, tungsten and other high-melting point metals made from an appropriately shaped evaporation source, place the load on the material to be evaporated so that the air flows through, and the direct heating of the evaporation material evaporates, or the substance that evaporates into alumina, and the molybdenum oxide is indirectly heated in the evaporation crucible, that is, the resistance heating evaporation method.
The steam plating adopts a resistance heating heater coating machine with simple structure, low cost and reliable work. For the coating materials of the steam plating, it can adopt a low melting point, which is especially suitable for mass production with low coating quality requirements, so far, the aluminum mirror has been widely used in the production of resistance heating evaporation process.
The disadvantage is resistance heating: The maximum temperature that can be achieved by heating is limited, and the fluid with a shorter heater life.
In recent years, in order to improve the life of the heater, with conductive ceramic material as the heater, bn with long life at home and abroad has been synthesized.
According to the Japanese Patent report, The Crucible can be produced by melting refractory materials to form 20% to 30% boron nitrogen and its phase, and zinc oxide and surface are coated with 62% to 82% zirconium, the rest are zirconium-silicon alloy materials.
Evaporation plating of steam source.
The water will evaporate into the steel crucible material, and the direct electron-
Vacuum evaporation coating technology is an important heating method and development direction. It can make the evaporation material vaporize and the evaporation film condense on the surface of the substrate.
Overcome many disadvantages of general resistance heating evaporation, especially for the production of thin film materials with high purity and melting point materials of thin film.
Depending on the vacuum electron injection evaporation deposition technology, the electronic injection steam source in different forms can be divided into ring gun, straight gun, e-
Hollow cathode gun and other types of gun.
The circular gun is emitted from a circular cathode to an electron beam, and after the metal evaporates the material, the focus and deflection will be played in the Crucible.
Its structure is relatively simple, but the power and efficiency are not high. It is basically a laboratory equipment. The equipment currently being produced is no longer in use.
A symmetrical gun is a straight-line speed gun that electrons gather from a cathode filament into a thin bundle and are accelerated by an anode coated material to counter manipulation in the melting and evaporation of the Crucible.
The power of several hundred watts straight from the gun is several hundred watts, titanium dioxide and some can be used for vacuum evaporation, and some can be used for vacuum smelting.
The disadvantage is that the direct evaporation material of the gun will pollute the structure of the gun, the stability is not good, and the pollution of sodium ions released on the filament will cause the membrane, which has recently been studied by the West, at the exit of the electron beam deflection magnetic field setting, as well as part of the filament made of an independent exhaust system made of the improved gun straight form, not only will the filament be completely dry on membrane contamination, it also helps to improve the life of the gun. e-
Type electron gun, a deflection electron gun of 270 degrees Celsius overcomes the disadvantage of a straight gun, and more often uses an electronic steam source. e-
The type of electron gun can produce a large amount of power density, high melting point to melt the metal, magnesium sand leads to evaporation of high-energy particles, and the film and substrate have a solid, high-quality film.
The shortcomings of the need for a higher e-cigarette vacuum and the need to use negative pressure, the vacuum chamber requires an inspection board, resulting in these complex equipment structures, poor safety, easy maintenance, and higher cost.
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