Vacuum coating equipment manufacturers explain the classification and structure of vacuum pumps
The vacuum coating equipment manufacturer said that the pump body layout structure of the vacuum pump determines the overall structure of the pump.
The inlet and outlet of the vertical structure are arranged horizontally, which is convenient for the assembly and connection of pipelines. However, the pump has a high center of gravity and poor stability at high speed, so this type is mostly used for small pumps.
The inlet of the horizontal pump is at the top and the outlet is at the bottom. Sometimes in order to facilitate the installation and connection of the vacuum system pipes, the exhaust ports can be connected from the horizontal direction, that is, the intake and exhaust directions are perpendicular to each other. At this time, the exhaust port can be opened from both left and right directions, except for one end of the exhaust pipe, the other end is blocked or connected with a bypass valve. This pump has a low center of gravity and good stability at high speeds. Generally, large and medium-sized pumps use this structure.
The two rotor shafts of the pump are mounted perpendicular to the horizontal plane. With this structure, the assembly clearance is easy to control, the rotor assembly is convenient, and the pump occupies a small area. However, the center of gravity of the pump is high, the disassembly and assembly of the gear is inconvenient, and the lubricating mechanism is relatively complicated.
2. The transmission mode of the pump
The two rotors of the vacuum pump run relatively synchronously through a pair of high-precision gears. The drive shaft is connected to the motor through a coupling. In the transmission structure arrangement, the motor and gear are placed on the same side of the rotor. The driven rotor is directly driven by the gear at the motor end, so that the torsional deformation of the driving rotor shaft is small, and the gap between the two rotors will not change due to the large torsional deformation of the driving shaft, so that the gap between the rotors is running. time is uniform.
According to the coater manufacturer, the biggest disadvantages of this transfer method are:
1) There are three bearings on the drive shaft, which increases the difficulty of processing and assembling the pump, and the disassembly and adjustment of the gear is inconvenient;
2) The overall structure is asymmetrical, and the center of gravity of the pump is biased towards the motor and gearbox side.
According to the working principle of vacuum pump, it can be basically divided into two types: gas delivery pump and gas capture pump.
Gas delivery pumps include:
1. Liquid ring vacuum pump;
2. Reciprocating vacuum pump;
3. Rotary vane vacuum pump;
4. Fixed vane vacuum pump;
5. Slide valve vacuum pump;
6. Cycloidal vacuum pump;
7. Dry vacuum pump;
8. Roots vacuum pump;
9. Molecular vacuum pump;
10. Traction molecular pump;
11. Compound vacuum pump;
12. Water jet vacuum pump;
13. Gas jet pump;
14. Steam jet pump;
15. Diffusion pump, etc.
Gas capture pumps include adsorption pumps and cryopumps.
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