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Understand the working principle of vacuum coating machine

Understand the working principle of vacuum coating machine

2020-10-03

Vacuum coating machine mainly refers to a kind of coating which needs to be carried out under high vacuum, including vacuum ion evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition and so on. The main ideas are evaporation and sputtering.

The working principle of vacuum coating machine is as follows:

In the field of coating, the thickness of the film sample after coating is an important factor affecting the performance of the film. Therefore, when evaluating the properties of a film sample, it is necessary to detect the properties of the film samples under different thickness. In the case of vacuum coating, it is often necessary to prepare several samples. There are two problems in the preparation of samples such as: first, the state of the instrument is different for different growing samples, so that the factors affecting the performance of the film samples may not only be the thickness; secondly, the vacuum coating experiment needs to obtain the samples again, which is not often time consuming. Increased production and testing costs.

Therefore, a multifunctional magnetron sputtering coating system is provided. The system is integrated by the vacuum coating system and glove box system. It can be used to evaporate the film in the high vacuum evaporation chamber, and store, prepare and test the sample after evaporation in the atmosphere of high purity inert gas in the glove box. The combination of evaporation coating and glove box can realize the whole closed production of evaporation plating, packaging, testing and other processes. The whole film growth and device preparation process are highly integrated into a complete controllable environment environment system, eliminating the influence of unstable factors in the atmospheric environment during the preparation of organic large area circuit, and ensuring the preparation of high performance and large area organic photoelectric devices and circuits.

The main purpose of the multifunctional magnetron sputtering coating system is to prepare various metal films, semiconductor films, dielectric films, magnetic control films, optical films, superconducting films, sensing films and functional films with special needs.


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