Under extremely high vacuum of extremely high PVD vacuum coating machine
The physical characteristics of the gas molecules in the extremely high vacuum state of the extremely high PVD vacuum coating machine are completely different from the atmospheric pressure, low vacuum or high vacuum environment. In a very high vacuum state, there is only a very small collision probability between gas molecules, and the gas molecules deviate from the law of motion of Maxwell's velocity distribution law. Although the collision of gas molecules with the wall of the vacuum chamber is the main one, the number of collisions is also very small. Therefore, it takes a long time for gas molecules to form a monomolecular adsorption layer on the surface of the object in contact with the vacuum.
Vacuum coating is to vapor-deposit metal aluminum copper and other materials on the surface of the roll-shaped plastic film by heating in a vacuum environment. Vacuum coating equipment consists of two parts: vacuum equipment and vacuum system. The vacuum system mainly uses diffusion pump as the main pump to achieve vacuum.
Existing vacuum system, regardless of whether the vacuum equipment is in working state or shut down state, the diffusion pump is in continuous evacuation state. If the vacuum equipment is in a shutdown state, the valve cover above the diffusion pump will fall to cover the air inlet of the diffusion pump, and the diffusion pump will pump itself; when the vacuum equipment is working, the remaining pump sets will pre-pump to meet certain conditions. Generally, when it is 3-5Pa, the valve cover above the diffusion pump is lifted, and the diffusion pump pumps the vacuum equipment. In this kind of vacuum system, when the vacuum equipment is in a shutdown state, the diffusion pump continues to work, which wastes a lot of electric energy, consumes a lot of energy, and leads to high production costs.
Technology realization factors:
The purpose of this utility model is to provide a vacuum system for vacuum coating machine to solve the above technical problems.
In order to solve the above problems, the technical solution adopted by this utility model is:
An evacuation system of a vacuum coating machine includes an evacuation mechanism connected to a vacuum chamber through a pipeline, a vacuum detection mechanism and a PLC control system; the evacuation mechanism includes a mechanical pump, a first roots pump, a second roots pump, and a diffuser Pump, wherein the mechanical pump, the first roots pump, and the second roots pump are connected to the vacuum chamber by pipelines to form a pre-exhaust air path from the pump body to the vacuum chamber. A Roots pump and a diffusion pump are connected to the vacuum chamber by pipelines to form a vacuum air path leading from the pump body to the vacuum chamber, and set on the pipeline between the first Roots pump and the second Roots pump There is a first valve, a second valve is provided on the pipeline between the first Roots pump and the diffusion pump, and a third valve is provided on the pipeline between the diffusion pump and the vacuum chamber; the second Roots pump is connected to The pipe between the vacuum chambers is provided with a vent pipe, and a vent valve is installed on it; the diffusion pump is connected with a maintenance pump through the pipe; the vacuum detection mechanism includes a first vacuum gauge, a second vacuum gauge, and a third vacuum gauge. The vacuum gauge and the fourth vacuum gauge, wherein the first vacuum gauge is arranged on the pipeline between the vacuum chamber and the vent pipe, the second vacuum gauge is arranged on the pipeline between the maintenance pump and the diffusion pump, and the third vacuum gauge is Four vacuum gauges are set on the pipeline between the vacuum chamber and the diffusion pump; the mechanical pump, the first roots pump, the second roots pump, the diffusion pump, the maintenance pump, the first valve, the second valve, and the third valve And the air release valve is respectively connected and controlled by the PLC control system; the first vacuum gauge, the second vacuum gauge, the third vacuum gauge, and the fourth vacuum gauge are respectively connected to the signal input end of the PLC control system; the diffusion pump It is equipped with a power regulator, and the power regulator is connected and controlled by a PLC control system.
Beneficial effects: Compared with the prior art, the utility model is equipped with a power regulator on the diffusion pump, and the power of the diffusion pump is adjusted at any time according to the PLC setting value, which can not only achieve the maintenance of the vacuum state, but also achieve the effect of saving electricity , Reducing energy consumption, while reducing production costs.
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