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Ultra-high PVD vacuum coating equipment​ in 1966

Ultra-high PVD vacuum coating equipment​ in 1966

2021-01-24

Ultra-high PVD vacuum coating equipment in 1966


In 1966, Columbia University established an ultra-high vacuum device with a molecular weight of 254nm (10 inches) in diameter. Due to the use of molecular sedimentation design, the device can perform simulation tests in a vacuum pressure environment of 10⁻¹⁰Pa. Of the above five ultra-high vacuum systems, except for the first one that is made of glass, the rest are all made of metal, and they all use a 4.2K or 20K low temperature environment. This low-temperature environment is not achievable by ordinary laboratories. Even with such conditions, the operating cost of the equipment is very high. This may be one reason why the development and application of ultra-high vacuum technology is limited. In order to solve this contradiction, people have been seeking new and easier ways to obtain ultra-high vacuum.



PVD vaccum coating equipment




Technical features:


1. A vacuuming system of a vacuum coating machine, comprising a vacuuming mechanism, a vacuum detection mechanism and a PLC control system connected to a vacuum chamber (1) through a pipeline; the vacuuming mechanism includes a mechanical pump (2) and a first roots pump (3), the second roots pump (4) and the diffusion pump (5), wherein the mechanical pump (2), the first roots pump (3) and the second roots pump (4) are connected in sequence through a pipeline A pre-evacuation path from the pump body to the vacuum chamber (1) is formed between the vacuum chamber (1), and the mechanical pump (2), the first roots pump (3) and the diffusion pump (5) pass through the pipeline Between the sequential connection and the vacuum chamber (1), a vacuum air path from the pump body to the vacuum chamber (1) is formed, and between the first roots pump (3) and the second roots pump (4) A first valve (6) is arranged on the pipeline, a second valve (7) is arranged on the pipeline between the first Roots pump (3) and the diffusion pump (5), and the diffusion pump (5) and the vacuum chamber ( 1) is provided with a third valve (8) on the pipeline between the second roots pump (4) and the vacuum chamber (1) is provided with a vent pipe (9), which is installed A gas valve (10); the diffusion pump (5) is connected with a maintenance pump (11) through a pipeline; the vacuum detection mechanism includes a first vacuum gauge (12), a second vacuum gauge (13), and a third vacuum gauge (14) and the fourth vacuum gauge (15), wherein the first vacuum gauge (12) is arranged on the pipeline between the vacuum chamber (1) and the vent pipe (9), and the second vacuum gauge (13) is arranged on the maintenance On the pipeline between the pump (11) and the diffusion pump (5), the third vacuum gauge (14) and the fourth vacuum gauge (15) are arranged on the pipeline between the vacuum chamber (1) and the diffusion pump (5); The mechanical pump (2), the first roots pump (3), the second roots pump (4), the diffusion pump (5), the maintenance pump (11), the first valve (6), the second valve (7) ), the third valve (8) and the air release valve (10) are respectively connected and controlled by the PLC control system; the first vacuum gauge (12), the second vacuum gauge (13), and the third vacuum gauge (14) And the fourth vacuum gauge (15) are respectively connected to the signal input end of the PLC control system; it is characterized in that: the diffusion pump (5) is equipped with a power regulator (16), and the power regulator (16) is connected And controlled by PLC control system.


  Technical Summary


   This utility model relates to the technical field of vacuum coating, in particular to a vacuum system of a vacuum coating machine. It includes an evacuation mechanism, a vacuum detection mechanism, and a PLC control system connected to the vacuum chamber through a pipeline; the evacuation mechanism includes a mechanical pump, a first Roots pump, a second Roots pump, and a diffusion pump, wherein the mechanical pump, the first The first roots pump and the second roots pump are connected to the vacuum chamber by pipelines to form a pre-exhaust air path, and the mechanical pump, the first roots pump and the diffusion pump are connected to the vacuum chamber by pipelines to form a path Vacuum pumping air circuit; the diffusion pump is equipped with a power regulator, and the power regulator is connected and controlled by a PLC control system. The utility model is equipped with a power regulator on the diffusion pump to adjust the power of the diffusion pump at any time according to the PLC setting value, which can not only realize the maintenance of the vacuum state, but also achieve the effect of saving electricity, reducing energy consumption and reducing production at the same time cost.

PVD vacuum coating equipment,Magnetron Sputtering Coating Machinery,Magnetron Sputtering Coating Machinery

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