Two of the uniformity of PVD vacuum coating equipment in PVD vacuum coating
The uniformity of the thickness of PVD vacuum coating:
It can also be understood as roughness. On the scale of optical film (that is, 1/10 wavelength as a unit, about 100A), the uniformity of vacuum coating is quite good, and the roughness can be easily controlled at 1/of the wavelength of visible light. Within the range of 10, that is to say, for the optical properties of the film, there is no obstacle to vacuum coating. But if it refers to the uniformity on the atomic layer scale, that is to say, to achieve a surface level of 10A or even 1A, the specific control factors will be explained in detail below according to different coatings.
The uniformity of the chemical composition of PVD vacuum coating:
That is to say, in the film, the atomic composition of the compound will easily produce uneven characteristics due to the small size. For the SiTiO3 film, if the coating process is not scientific, then the actual surface composition is not SiTiO3, but may be other proportions. The coated film is not the chemical composition of the desired film, which is also the technical content of vacuum coating. The specific factors are also given below.
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