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There are two ways to connect the leak detection device of the PVD vacuum coating machine and the auxiliary vacuum pumping system

There are two ways to connect the leak detection device of the PVD vacuum coating machine and the auxiliary vacuum pumping system

2020-09-12

There are two ways to connect the leak detection device of the PVD real coating machine and the auxiliary vacuum pumping system


PVD vacuum coating machine


There are two ways to connect the leak detection device and the auxiliary vacuum pumping system, each of which has different characteristics. When testing clean coating machine parts without large leaks, the leak detection device needs to be connected to the low vacuum (front stage) side; conversely, for contaminated equipment parts, in the case of large leaks, To find small leaks, the leak detection device needs to be installed on the side of the high vacuum. The position where the leak detection device is connected should be such that the maximum conductance between the leak detection device and the parts of the equipment under test is to allow higher concentration of helium to enter the leak detection device. When the leak detection device is connected to the low vacuum side, due to the unstable pumping speed of the foreline pump, the leak detection device will increase the noise and reduce the leak detection sensitivity to a certain extent, so it is best to connect one in series on the low vacuum side Diffusion pump, or add a regulator bottle. In the design of the auxiliary vacuum system, the connecting flange of the leak detection device should be reserved on both the low vacuum side and the high vacuum side.






Background technique:


The principle of sputtering coating is that under the action of the electric field, the plasma generated by the rare gas in the abnormal glow discharge bombards the surface of the cathode target, sputtering out the molecules, atoms, ions, and electrons on the target surface. The ejected particles have a certain kinetic energy, and are projected toward the surface of the substrate in a certain direction to form a coating on the surface of the substrate.


At present, the sputtering of the target material inside the vacuum chamber cannot be eliminated. The maximum effective adsorption area for the target material sputtered by the target material is the internal surface of the vacuum chamber and the shielding plate. The long-term target sputtering will inevitably produce The target material on the surface of the shielding plate is accumulated. When the target material accumulated on the shielding plate reaches a certain thickness, the shielding plate needs to be cleaned; in the prior art, the structure of the shielding plate inside the vacuum chamber is flat, and the flat structure is used for shielding Plate, the target material accumulated in the planar structure is less, and frequent maintenance and cleaning are required, which reduces the utilization efficiency of the vacuum coating machine.


  Technology realization factors:


  An object of the present invention is to solve at least the above-mentioned problems and/or deficiencies, and to provide at least the advantages described later.


  In order to achieve these objectives and other advantages according to the present invention, a vacuum chamber for a vacuum coating machine is provided, including:


  Vacuum chamber;


   wavy shield, which can be detachably connected to the inner wall of the vacuum chamber;


   the main drive roller, which is arranged in the center of the lower part of the vacuum chamber; the unwinding roller and the winding roller are symmetrically arranged on the upper part of the vacuum chamber;


  Three coating targets, which are placed equidistantly around the outer circle of the main driving roller, and located below the main driving roller.


   Preferably, the laying surface of the wave-shaped shielding plate on the inner wall of the vacuum chamber matches the inner wall of the vacuum chamber.


   Preferably, the detachable connection between the wave-shaped shielding plate and the inner wall of the vacuum chamber is a bolt connection.


Preferably, the detachable connection between the wave-shaped shielding plate and the inner wall of the vacuum chamber is as follows: a bending part is provided at the end of the wave-shaped shielding plate, and the inner wall of the vacuum chamber is provided with A card slot matched with the bending part, and the card slot and the bending part are matched and connected to realize the detachable connection of the wave-shaped shielding plate and the inner wall of the vacuum chamber.


   Preferably, the vacuum cavity is provided with a suction hole for connecting a vacuum pumping unit and an inflation hole for connecting an inflation system.


   Preferably, it further includes a guide roller, which is arranged in the vacuum chamber, and the guide roller is respectively located between the main driving roller and the unwinding roller, and between the main driving roller and the winding roller.


The utility model at least includes the following beneficial effects: the utility model sets the shielding baffle inside the vacuum chamber as a wave-shaped shielding baffle, which effectively increases the overall area of the baffle, allowing the baffle to absorb more targets better and Material, reduce the frequency of maintenance, thereby increasing the effective production time of the equipment.


  Other advantages, objectives and features of the present utility model will be partly embodied by the following description, and partly will be understood by those skilled in the art through the research and practice of the present utility model.


  Explanation:


   Figure 1 is a schematic diagram of the structure of the vacuum chamber of the vacuum coating machine of the present invention;


   Figure 2 is a schematic structural diagram of another vacuum chamber used in a vacuum coating machine of the present invention;


   Figure 3 is a schematic diagram of the structure of the wave-shaped shielding baffle of the utility model.


  detailed description:


   The following is a further detailed description of the utility model in conjunction with the accompanying drawings, so that those skilled in the art can implement it with reference to the text of the description.


"It should be understood that terms such as "having", "including" and "including" used herein do not exclude the presence or addition of one or more other elements or combinations thereof.


   Figures 1 to 3 show a vacuum chamber for a vacuum coating machine of the present invention, including:


  Vacuum chamber 1;


   wavy shield plate 2, which is detachably connected to the inner wall of the vacuum chamber 1;


   main drive roller 3, which is set in the middle of the lower part of the vacuum chamber 1; the unwinding roller 4 and the winding roller 5 are symmetrically arranged on the upper part of the vacuum chamber 1;


  Three coating targets 6 are placed equidistantly around the outer circle of the main driving roller 3 and located below the main driving roller 6.


In the above technical solution, the substrate to be plated is received from the unwinding roller through the main driving roller in the vacuum chamber to the winding roller, the vacuum chamber is pumped to a certain degree of vacuum, and the working gas is filled to start The coating control power supply of the vacuum coating machine enables the three coating targets to undergo reactive sputtering. When the substrate to be coated continuously conveyed by the main driving roller, unwinding roller and winding roller passes through the sputtering area of the three coating targets When the film is deposited on it; the target material sputtered into the vacuum chamber is absorbed by the wave-shaped shielding baffle; by setting the wave-shaped shielding baffle inside the vacuum chamber, it effectively increases the overall area of the baffle, allowing The baffle can better and more adsorb the target material, reduce the number of maintenance, thereby increasing the effective production time of the equipment, for example, the 1000mm*800mm shielding baffle can be changed to a wave-shaped baffle, which can theoretically increase by 25 % Of the baffle area; if the baffle is maintained for 5 times/month, and each maintenance takes 3 hours, if the baffle area is increased by 25%, the maintenance time of 3*5*25%=3.75h can be saved in one month; If the equipment runs at a speed of 0.8m/min, it can increase the production of 0.8*225=180m; if the equipment runs at a speed of 1.2m/min, it can increase the production of 1.2*225=270m.


In the above technical solution, the laying surface of the wave-shaped shielding plate 2 on the inner wall of the vacuum chamber matches the inner wall of the vacuum chamber. In this way, the sputtering target can be absorbed in a larger area without It will reduce the space in the vacuum chamber.


   In the above technical solution, the detachable connection between the wave-shaped shielding plate and the inner wall of the vacuum chamber is by bolts 8. In this way, the wave-shaped shielding plate can be easily disassembled and installed.


In the above technical solution, the detachable connection between the wave-shaped shielding plate 2 and the inner wall of the vacuum chamber 1 is as follows: the end of the wave-shaped shielding plate 2 is provided with a bending part 21, and the vacuum chamber The inner wall of 1 is provided with a card slot 11 matching the bending part, and the card slot 11 and the bending part 21 are matched and connected to realize the detachable connection of the wave-shaped shielding plate and the inner wall of the vacuum chamber. In this way, the wave-shaped shielding baffle can be removed and installed more conveniently.


   In the above technical solution, the vacuum chamber 1 is provided with a suction hole 13 for connecting a vacuum pumping unit and an inflation hole 14 for connecting a charging system.


In the above technical solution, it also includes a guide roller 7, which is arranged in the vacuum chamber 1, and the guide roller 7 is respectively located between the main driving roller 3 and the unwinding roller 4, and between the main driving roller 3 and the winding roller 5. ; Guide rollers can guide the substrate to be plated so that it can run accurately in the vacuum chamber.


Although the embodiments of the present utility model have been disclosed as above, it is not limited to the applications listed in the description and the embodiments. It can be applied to various fields suitable for the present utility model. For those familiar with the field, Additional modifications can be easily implemented, so without departing from the general concept defined by the claims and equivalent scope, the present invention is not limited to the specific details and the illustrations shown and described here.


  Technical characteristics:


   1. A vacuum chamber for a vacuum coating machine, characterized in that it comprises:


  Vacuum chamber;


   wavy shield, which can be detachably connected to the inner wall of the vacuum chamber;


   the main drive roller, which is arranged in the center of the lower part of the vacuum chamber; the unwinding roller and the winding roller are symmetrically arranged on the upper part of the vacuum chamber;


  Three coating targets, which are placed equidistantly around the outer circle of the main driving roller, and located below the main driving roller.


  2. The vacuum chamber for a vacuum coating machine according to claim 1, wherein the laying surface of the wave-shaped shielding plate on the inner wall of the vacuum chamber matches the inner wall of the vacuum chamber.


  3. The vacuum chamber for a vacuum coating machine according to claim 1, wherein the detachable connection between the wave-shaped shielding plate and the inner wall of the vacuum chamber is a bolt connection.


4. The vacuum chamber for a vacuum coating machine according to claim 1, wherein the detachable connection between the wave-shaped shielding plate and the inner wall of the vacuum chamber is: at the end of the wave-shaped shielding plate The inner wall of the vacuum chamber is provided with a bending part, and a clamping groove matching the bending part is provided on the inner wall of the vacuum chamber. The clamping groove and the bending part are matched and connected to realize the wave-shaped shielding plate and the inner wall of the vacuum chamber. The detachable connection.


  5. The vacuum chamber for a vacuum coating machine according to claim 1, wherein the vacuum chamber is provided with an exhaust hole for connecting a vacuum exhaust unit and an inflation hole for connecting an inflation system.


6. The vacuum chamber for a vacuum coating machine according to claim 1, further comprising a guide roller, which is arranged in the vacuum chamber, and the guide rollers are respectively located between the main driving roller and the unwinding roller. Between the driving roller and the winding roller.


  Technical Summary


The utility model discloses a vacuum chamber for a vacuum coating machine, comprising: a vacuum chamber; a wave-shaped shielding baffle, which is detachably connected to the inner wall of the vacuum chamber; and a main drive roller, which is arranged in the vacuum chamber The lower part is in the center position; the unwinding roller and the winding roller are symmetrically arranged on the upper part of the vacuum chamber; three coating targets are placed equidistantly around the outer circle of the main driving roller and located below the main driving roller The utility model sets the shielding baffle inside the vacuum chamber as a wave-shaped shielding baffle, which effectively increases the overall area of the baffle, so that the baffle can better and more adsorb target materials, reduce maintenance times, and increase Effective production time of equipment.


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