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The vacuum chamber of vacuum metallizing coating machine uses low temperature adsorbent at the same time

The vacuum chamber of vacuum metallizing coating machine uses low temperature adsorbent at the same time

2021-01-23

The vacuum chamber of vacuum metallizing coating machine uses low temperature adsorbent at the same time

The vacuum chamber of the multi-layer insulated medium and small vacuum metallizing coating machine uses low-temperature adsorbents while adopting new technology to extract air and increase the use of room temperature adsorbents, carbon-filled paper, or filling with carbon dioxide gas after exhausting. The exhausting time is complete. It can be shortened within 24 hours, and it can meet the long-life requirements of the vacuum chamber of the coating machine with only a mechanical pump without a diffusion pump.





PVD vacuum coating machine




Physical vapor deposition (PVD) is a technique of depositing thin films on substrates by physical means. The cooling system of physical vapor deposition equipment is mainly used to cool the parts of equipment, such as vacuum pump group, oil diffusion pump, reaction chamber wall, target source, etc. In order to achieve the overall cooling effect of the equipment, the current PVD equipment generally adopts the flow channel cooling. Generally, for the parts that need to be cooled, due to the need of anti-corrosion function, such parts are usually made of stainless steel or other materials with strong anti-corrosion function. The chiller pumps the cooled water into the above parts to be cooled, and the cooled water finally flows back to the chiller through the corresponding pipes to realize a cooling water cycle. However, in the actual production process, due to the quality of the cooling water used and other unknown reasons, the above-mentioned parts, such as the outer wall of the reaction chamber, the outer wall of the diffusion pump, the cooling water pipe, especially the target source and other parts, produce the phenomenon of dirt precipitation. The more common situation is that the Yellow suspended matter generated after corrosion disperses in the cooling water and enters all the above-mentioned parts with the cooling water The effective cooling water flow decreases and the cooling effect is affected. For the above-mentioned corrosives deposited in the cooling pipe of the outer wall of the diffusion pump and the liquid storage cavity of the reaction chamber, the usual method is to dismantle the target source for large-scale cleaning and maintenance, which will cost more manpower and easily cause shutdown loss.


Physical vapor deposition (PVD) is a technique of depositing thin films on substrates by physical means. The cooling system of physical vapor deposition equipment is mainly used to cool the parts of equipment, such as vacuum pump group, oil diffusion pump, reaction chamber wall, target source, etc. In order to achieve the overall cooling effect of the equipment, the current PVD equipment generally adopts the flow channel cooling. Generally, for the parts that need to be cooled, due to the need of anti-corrosion function, such parts are usually made of stainless steel or other materials with strong anti-corrosion function. The chiller pumps the cooled water into the above parts to be cooled, and the cooled water finally flows back to the chiller through the corresponding pipes to realize a cooling water cycle. However, in the actual production process, due to the quality of the cooling water used and other unknown reasons, the above-mentioned parts, such as the outer wall of the reaction chamber, the outer wall of the diffusion pump, the cooling water pipe, especially the target source and other parts, produce the phenomenon of dirt precipitation. The more common situation is that the Yellow suspended matter generated after corrosion disperses in the cooling water and enters all the above-mentioned parts with the cooling water The effective cooling water flow decreases and the cooling effect is affected. For the above-mentioned corrosives deposited in the cooling pipe of the outer wall of the diffusion pump and the liquid storage cavity of the reaction chamber, the usual method is to dismantle the target source for large-scale cleaning and maintenance, which will cost more manpower and easily cause shutdown loss.




Sapphire hard coating Machine,vacuum metallizing coating machine,Sapphire hard coating Machine

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