The temperature rise of ultra-high PVD vacuum coating machine in 1968
In 1968, foreign countries used liquid helium to freeze titanium sublimation traps to obtain a vacuum pressure environment of less than 10⁻¹¹Pa. As a result, the temperature used to obtain ultra-high vacuum is increased from 4.2K or 20K to 77.4K, which provides favorable conditions for the promotion of ultra-high vacuum technology.
Vacuum coating refers to a method of heating metal or non-metal materials under high vacuum conditions to evaporate and condense on the surface of the plated parts to form a thin film. The vacuum coating machine will generate a lot of heat when it is working, and it needs to be cooled in time and effectively to ensure its normal operation.
China Patent Application cn20181049682 discloses "a multi-functional vacuum coating machine", including the vacuum coating machine body, control panel, rapid cooling device, air supply pipe, air supply box, air extraction pipe, air extraction box, diffusion pump, roots Pumps, machine pumps, suction dust collectors, suction air pumps, supplementary air dust collectors, supplementary air pumps. The rapid cooling device includes a frame, a sink, a water plug, a sponge metal mesh, a cooling fan, an air inlet, and The control panel is arranged on the left side of the vacuum coating machine body, the rapid cooling device is arranged on the right side of the vacuum coating machine body, and the air supply box is connected to the inside of the vacuum coating machine body through the air supply pipe Connected, the air extraction box is connected with the vacuum coating machine body through the air extraction pipe. Although the invention has simple structure, convenient operation and complete functions, it can maintain a dust-free environment in the vacuum chamber, and can quickly cool down the inside of the coating machine to improve work efficiency. The sealing ring can prevent gas leakage, but it is difficult to disassemble the sponge metal mesh , Resulting in inconvenient maintenance; and its height is fixed, it is difficult to apply to uneven ground, inconvenient to place stable.
Technology realization factors:
The purpose of the present utility model is to provide a multifunctional vacuum coating machine, which solves the problem that it is difficult to disassemble the sponge metal mesh, which causes inconvenience in maintenance; and its height is fixed, it is difficult to apply to uneven ground, and it is inconvenient to place it smoothly.
In order to achieve the above object, the present invention provides the following technical solutions: a multifunctional integrated vacuum coating machine, including a vacuum coating machine body, the outside of the vacuum coating machine body is provided with a heat dissipation shell, one of the heat dissipation shells A supplemental air box is fixedly installed on the side, and a supplemental air dust collector and a supplemental air pump are respectively arranged inside the supplementary air box. The supplemental air dust collector is in communication with the supplemental air pump, and the top of the supplemental air pump is fixedly connected with a through air supplement And the air pipe of the heat dissipation housing, the other side of the heat dissipation housing is fixedly connected with a ventilation pipe, a water trough is arranged between the ventilation pipe and the heat dissipation housing, and a heat dissipation fan and a card are respectively arranged inside the ventilation pipe A groove and a sponge metal mesh, the outside of the ventilation pipe is provided with a gap that matches the sponge metal mesh, and the sponge metal mesh is connected with the water tank, and one side of the sponge metal mesh is fixedly installed with a fixing block, the fixing block A mounting groove is provided on the upper surface of the mounting groove, a limit ring and a spring are arranged inside the mounting groove, the limit ring is located directly above the spring, and the inside of the limit ring and the spring are jointly provided with a movable block penetrating through the fixed block The movable rod corresponds to the slot.
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