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The specific operation of vacuum coating equipment

The specific operation of vacuum coating equipment

2022-01-20

The specific operation of vacuum coating equipment







In the finished vacuum coating equipment, there are specific operating procedures, which can be operated by referring to the equipment manual, the instrument panel pointer display on the equipment, and the labeling instructions under each knob:


① Check whether each operation control switch of the vacuum coating machine is in the "off" position.

② Turn on the main power switch, and the equipment is powered on.

③ Pull out the low pressure valve. Open the inflation valve, after the sound of airflow can not be heard, start the bell valve, and the bell rises.

④ Install and fix the tungsten spiral heater. Fix the PVDF film and aluminum cover on the rotating disc. Thread the aluminum wire into the helical heater. Clean all parts of the bell jar to ensure that there are no impurities.

⑤ Drop the bell jar.

⑥ Start the vacuum mechanical pump.

⑦ Turn on the power supply of the composite vacuum gauge (the model of the composite vacuum gauge: Fzh-1A).

a. Turn the left knob "1" clockwise to point to the heating position of zone 2.

b. The pointer in "2" of the low vacuum meter moves clockwise. When the pointer moves to 110mA, the left knob "1" is rotated to point to the measurement position of section 2.

⑧ When the pointer in "2" of the low vacuum gauge moves clockwise to 6.7Pa again, the low pressure valve is pushed in. At this time, the left knob "1" is rotated to point to the measurement position of section 1.

⑨ Turn on the cooling water for the vacuum coating machine, start the diffusion pump, and heat for 40 minutes.

⑩ The low pressure valve is pulled out. Repeat the ⑦ action procedure: the lower left knob "1" turns to point to the measurement position of the 2 section. The pointer in the low vacuum meter "2" moves clockwise. When the pointer moves to 6.7Pa, open the high pressure valve (the valve stem rotates clockwise).

? When the pointer in "2" of the low vacuum gauge moves to the right to 0.1Pa, turn on the filament switch of the gauge.

a. Rotate the transmit and zero measurement knob “9” to point to the transmit position.

b. Rotate the lower left knob “1” to point to the measurement position of zone 1.

? Rotate the emission adjustment knob "4", so that the pointer in the high pressure vacuum gauge "5" points to 5.

• Transmit, Zero, and Measure knob “9” is turned to point to the zero position.

? Rotate the zero adjustment knob "10" to make the pointer in "5" of the high pressure vacuum gauge point to the 0 position.

? Transmit, zero, measure knob “9” is turned to point to measure position.

? Rotate the standard adjustment knob "3" so that the pointer in the "5" of the high pressure vacuum gauge points to 10.

? Rotate the "multiplier" switch knob "8" to point to 10-12, when the pointer in the high-pressure vacuum gauge "5" moves to the left more than 1 counterclockwise, then turn the "multiplier" switch knob "8" to point to 10- 3.

? When the pointer in the "5" of the high-pressure vacuum gauge moves counterclockwise more than 6.7Pa, turn on the workpiece rotary switch, and the PVDF film of the plated piece in the bell jar rotates.

? Turn on the evaporation button switch. Insert the current distribution plug into the distribution hole of the evaporation electrode (there are 1, 2, 3, and 4 holes, which can be inserted into any hole).

• Turn the right regulator handwheel with your right hand and slowly turn the boost.

a. Observe the color change of the heating temperature of the tungsten spiral heater from the sight glass window.

b. When the color of the tungsten spiral heater turns yellow-orange and the aluminum wire begins to melt, operate the baffle button with your left hand to remove the baffle above the tungsten spiral.

c. All aluminum wires are melted and evaporated, and the baffle is returned to its original position.

d. Rotate the regulator handwheel to the zero position with the right hand. The first evaporation work is completed.

21. If you want to evaporate again (in order to increase the thickness of the electrode metal layer): pull out the current sub-plug and insert it into another electrode distribution hole. Repeat the operation action.

22. Turn off the gauge filament switch. Close the high pressure valve (turn the handle counterclockwise). Turn off workpiece rotation. Turn off evaporation. Turn the mechanical pump knob to point to the diffusion pump.

23. The low pressure valve is pulled out. The bell is inflated. Inflate for a period of time, when there is no sound of air, the bell jar will rise.

24. Aluminum wire is added to the tungsten spiral heater. The PVDF film is replaced with the other side facing down (the original one has been plated with an aluminum film facing up). Fastened to the rotating disc.

25. Drop bell jar. Turn on the mechanical pump.

a. Rotate the lower left knob “1” to point to the measurement position of zone 2.

b. When the pointer in "2" of the low pressure vacuum gauge moves clockwise to 6.7Pa, the low pressure valve is pushed in.

c. Rotate the lower left knob “1” to point to the measurement position of zone 1.

d. When the pointer in "2" of the low pressure vacuum gauge moves clockwise to 6.7Pa, open the high pressure valve. Turn the knob "1" to point to the 2-segment measurement position.

e. When the pointer in "2" of the low pressure vacuum gauge moves clockwise to point to 0.1Pa, open the gauge tube filament.

f. Repeat from ? to ? .

26. After the PVDF film evaporates the aluminum layer, turn off the regulating filament, high-pressure valve, mechanical pump, and diffusion pump in sequence. Pull the low pressure valve out. The bell jar is inflated, and the bell jar is raised after the inflation is completed. Take out the workpiece and do a good job in cleaning the bell jar.

a. Drop the bell jar.

b. Turn on the mechanical pump, pump for 3~5min, and stop the mechanical pump.

c. Cut off the main power switch.

d. Turn off the cooling water after 1h. The operation is all complete.

27. In normal production, in the event of a sudden power failure, immediately cut off the high vacuum measurement, turn off the gauge filament, and pull out the high pressure valve and low pressure valve. After the call is made, let the mechanical pump start working for 3-5 minutes, and then switch to normal production.


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