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The role of various vacuum pumps in vacuum coating equipment in vacuum system

The role of various vacuum pumps in vacuum coating equipment in vacuum system

2022-05-29

The role of various vacuum pumps in vacuum coating equipment in vacuum system








In addition to the common point of vacuuming the container, the performance of various vacuum pumps also has differences. Therefore, it is very important to clarify the work tasks undertaken by the vacuum pump in the vacuum system when selecting. The functions of vacuum pumps in various fields of work can be summed up in the following aspects:

1. The main vacuum pump in the system

The so-called main vacuum pump is a vacuum pump that directly evacuates the pumped container of the vacuum system to obtain the vacuum degree required to meet the process requirements.

2. Rough vacuum pump

Rough pump refers to a vacuum pump that reduces the pressure of the vacuum system from atmospheric pressure until another pumping system can start to work.

3. Front vacuum pump

A foreline pump is a vacuum pump used to maintain the foreline pressure of another pump below its allowable foreline pressure.

4. Maintain the vacuum pump

The maintenance pump means that the main backing pump cannot be effectively used when the vacuum system is very small. For this reason, an auxiliary backing pump with a small pumping speed is additionally equipped in the vacuum system to maintain the normal operation of the main pump or maintain the low-pressure vacuum pump required by the evacuated container.

5. Rough vacuum pump or low vacuum pump

The rough and rough vacuum pump refers to the vacuum pump that starts from the atmosphere and works in the low vacuum or rough vacuum pressure range after reducing the pressure of the pumped container.

6. High vacuum pump

A high vacuum pump refers to a vacuum pump that works in the high vacuum range.

7. Ultra-high vacuum pump

Ultra-high vacuum pump refers to a vacuum pump that works in the ultra-high vacuum range.

8. Booster vacuum pump

The booster pump usually refers to the vacuum pump that works between the low vacuum pump and the high vacuum pump to increase the pumping capacity of the pumping system in the intermediate pressure range or reduce the pumping rate of the backing pump.


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