The PVD vacuum coating machine process is mainly used in the second largest group-thin film solar cells
At present, the PVD vacuum coating machine process is mainly used in the second largest group-thin film solar cells. The main PVD coating material is sputtering target. Among them, the more commonly used sputtering targets include molybdenum target, copper target, aluminum target, chromium target, ITO target, AZO target (Aluminum Zinc Oxide), etc. The purity of coating target is generally above 99.99%. Among them, the copper target and the aluminum target are used for the conductive layer film, the AZO target and the ITO target are used for the transparent conductive layer film, and the chromium target and the molybdenum target are used for the barrier film.
The function of the cooling water chiller of the vacuum coating machine is to maintain the temperature of the vacuum coating machine, so that it can achieve the purpose of high precision and high efficiency temperature control. In the past, without a chiller, natural water and water tower heat dissipation were inevitably affected by natural temperature, and this method of control was extremely unstable. Therefore, it can be said that the chiller is a very important supporting cooling equipment in the vacuum coating equipment, because the chiller is directly related to the working effect of the vacuum coating machine.
Why does the vacuum coating machine need to be equipped with a chiller?
This should be viewed from the working principle of vacuum coating: the film material evaporates and crystallizes on the surface of the workpiece at high temperature. Because the air will produce resistance to the evaporated film material molecules and cause collisions to make the crystals rough and dull, it must be under high vacuum to make the crystals fine and bright. If the vacuum is not high, the crystals will lose their luster and have poor bonding force.
The chiller is equipped with a refrigeration system and a cooling water circulation system. The water temperature is adjusted and controlled within the range of 5℃～30℃, which can achieve the purpose of high precision and high efficiency temperature control. The cooling principle is: the refrigeration system cools the water, and then the low-temperature cooling water is sent to the vacuum coating machine by the water pump to cool down. The chilled water of the chiller takes away the heat and the temperature rises and then returns to the water tank to achieve cooling.
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