The principle of ultrasonic cleaning of vacuum coating machine
The principle of ultrasonic cleaning: the principle of "void phenomenon" caused by ultrasonic waves (that is, the density of the cleaning medium is changed by ultrasonic vibration), so as to achieve the cleaning effect of the PVD vacuum coating machine. Ultrasonic vibration causes the medium to form an instantaneous gap when it is sparse, and the instantaneous impact pressure generated when it is closed can be as large as the impact force of several atmospheres. This pressure is strong enough to destroy the oil film attached to the surface of the object, causing the oil film and pollutants Fall off into the solution together.
wavy shield, which can be detachably connected to the inner wall of the vacuum chamber;
main drive roller, which is arranged in the center of the lower part of the vacuum chamber; the unwinding roller and the winding roller are symmetrically arranged on the upper part of the vacuum chamber;
Three coating targets are placed equidistantly around the outer circle of the main driving roller and below the main driving roller.
Preferably, the laying surface of the wave-shaped shielding plate on the inner wall of the vacuum chamber matches the inner wall of the vacuum chamber.
Preferably, the detachable connection between the wave-shaped shielding plate and the inner wall of the vacuum chamber is a bolt connection.
Preferably, the detachable connection between the wave-shaped shielding plate and the inner wall of the vacuum chamber is as follows: a bending part is provided at the end of the wave-shaped shielding plate, and the inner wall of the vacuum chamber is provided with A card slot matched with the bending part, and the card slot and the bending part are matched and connected to realize the detachable connection of the wave-shaped shielding plate and the inner wall of the vacuum chamber.
Preferably, the vacuum cavity is provided with a suction hole for connecting a vacuum pumping unit and an inflation hole for connecting an inflation system.
Preferably, it further includes a guide roller, which is arranged in the vacuum chamber, and the guide roller is respectively located between the main driving roller and the unwinding roller, and between the main driving roller and the winding roller.
The utility model includes at least the following beneficial effects: The utility model sets the shielding baffle inside the vacuum chamber as a wave-shaped shielding baffle, which effectively increases the overall area of the baffle, allowing the baffle to absorb more targets better and Material, reduce the frequency of maintenance, thereby increasing the effective production time of the equipment.
Other advantages, objectives and features of the present utility model will be partly embodied by the following description, and partly will be understood by those skilled in the art through the research and practice of the present utility model.
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