The multilayer insulation of the high vacuum coating machine is also called super insulation. It is made of paper, nylon mesh, cloth, etc. (the material with low thermal conductivity and reflective screen) made of multi-layer glass fiber made of multilayer aluminum foil or aluminized polyester film (high reflectivity foil) in a high vacuum container. Hot objects are stacked on top of each other.
So far, it still has the advantages of small size, the best thermal insulation effect, light weight, and the lowest apparent thermal conductivity. This kind of insulation has been widely used in various high-vacuum coating equipment, cryogenic storage tanks, cryostats, space vehicles, cryogenic transportation pipelines, superconducting motors, refrigerators, and superconducting cables.
Vacuum coating will encounter film drop. What is the reason for this? How to solve these problems?
1, surface cleanliness
The surface cleanliness of the product is not enough. Consider the argon amplification and longer time when cleaning the ion source.
2, problems in the cleaning process
The cleaning is not in place before plating, or the cleaning fluid is replaced.
3. The problem of craftsmanship
Whether there is any change in the process parameters, make appropriate adjustments in the coating time and current.
4. The problem with the target material
Whether the titanium target is poisoned, check and replace it.
5. Whether the vacuum chamber is leaking
Perform a leak detection.
6. Product surface oxidation
There are many reasons for oxidation, so you can judge and deal with it yourself.
Silicon monoxide SiO, silicon dioxide SiO2, titanium dioxide TiO2, zirconium dioxide ZrO2, hafnium dioxide HfO2, titanium monoxide TiO, titanium pentoxide Ti3O5, niobium pentoxide Nb2O5, tantalum pentoxide Ta2O5, yttrium oxide Y2O3, High-purity oxide coating materials such as zinc oxide ZnO.
High-purity fluorides such as neodymium fluoride NbF3, barium fluoride BaF2, cerium fluoride CeF3, magnesium fluoride MgF2, lanthanum fluoride LaF3, yttrium fluoride YF3, ytterbium fluoride YbF3, and erbium fluoride ErF3.
3, other compounds
zinc sulfide ZnS, zinc selenide ZnSe, titanium nitride TiN, silicon carbide SiC, lanthanum titanate LaTiO3, barium titanate BaTiO3, strontium titanate SrTiO3, praseodymium titanate PrTiO3, cadmium sulfide CdS and other vacuum coating materials.
4. Metal coating material
High purity aluminum Al, high purity copper Cu, high purity titanium Ti, high purity silicon Si, high purity gold Au, high purity silver Ag, high purity indium In, high purity magnesium Mg, high purity zinc Zn, high purity platinum Pt, high purity germanium Ge, high purity nickel Ni, high-purity gold Au, gold-germanium alloy AuGe, gold-nickel alloy AuNi, nickel-chromium alloy NiCr, titanium aluminum alloy TiAl, copper indium gallium alloy CuInGa, copper indium gallium selenium alloy CuInGaSe, zinc aluminum alloy ZnAl, aluminum silicon alloy AlSi and other metal coatings material.
The above are the most common vacuum coating materials for vacuum coating machines. It should be noted that the type of vacuum coating machine used for each material in the vacuum coating machine is also different.
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