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The magnetron sputtering coating machine stops the gas diffusion and penetration during vacuuming

The magnetron sputtering coating machine stops the gas diffusion and penetration during vacuuming

2021-01-09

The magnetron sputtering coating machine stops the gas diffusion and penetration during vacuuming


During the period when the vacuum is stopped, the gas diffusion and penetration vacuum still exist. When the vacuum is stopped, the out-gassing rate of the material in the insulation layer of the vacuum device is the highest, the volume between the layers is small, and the pressure rises the fastest. The volume of the interlayer space is large, the out-gassing rate of surrounding materials is low, and the pressure rises the slowest. As a result, there is always a pressure difference between the insulation layer of the vacuum device and the interlayer space. According to tests, this pressure difference can be as high as tens or even hundreds of times when vacuuming, and several times or even ten times when vacuuming is stopped. When the vacuum is stopped, the gas in the insulation layer of the vacuum device can continuously reach the interlayer space through diffusion and permeation under the action of the pressure difference. At this time, the space always has a certain vacuum effect on the gas in the insulation layer of the vacuum device.







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