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The development history of vacuum coating equipment manufacturing technology

The development history of vacuum coating equipment manufacturing technology


The development history of vacuum coating equipment manufacturing technology

The vacuum coating technology of vacuum coating machines didn't take a long time. The application of CVD (chemical vapor deposition) technology to cemented carbide tools only appeared in the 1960s in the world. Because this technology needs to be carried out at high temperatures (process temperature higher than 1000ºC), the type of coating is single, and the limitations are great, and it was not promoted at first. By the end of the 1970s, PVD (Physical Vapor Deposition) technology began to appear. After that, the PVD coating technology of vacuum coaters has developed rapidly in just two to thirty years. The reasons are:

(1) It forms a film in a vacuum-sealed cavity, and there is almost no environmental pollution problem, which is conducive to environmental protection;

(2) It can get a bright and luxurious surface. In terms of color, mature colors include seven colors, silver, transparent, golden, black, and any color from golden to black, which can meet the decorative requirements. Various needs;

 (3) Ceramic coatings and composite coatings with high hardness and high wear resistance that are difficult to obtain by other methods can be easily obtained, and they can be used on tooling and molds to double the service life and achieve a low cost and high The effect of income;

  (4) In addition, PVD coating technology has the characteristics of low temperature and high energy, and can form a film on almost any substrate. Therefore, the application range is very broad, and its rapid development is not surprising.

The vacuum coating technology of vacuum coating machines has developed to this day, and new technologies such as PCVD (physical chemical vapor deposition) and MT-CVD (medium temperature chemical vapor deposition) have emerged. Various coating equipment and various coating processes are emerging in endlessly. At present, the more mature PVD methods mainly include multi-arc plating and magnetron sputtering. The multi-arc plating equipment has a simple structure and is easy to operate. The disadvantage of multi-arc plating is that under the condition of low-temperature coating with traditional DC power supply, when the coating thickness reaches 0.3 um, the deposition rate is close to the reflectivity, and the film formation becomes very difficult. Moreover, the surface of the film began to become hazy. Another disadvantage of multi-arc plating is that since the metal evaporates after melting, the deposited particles are larger, the density is low, and the wear resistance is worse than that of the magnetron sputtering method. It can be seen that multi-arc coating and magnetron sputtering coating have their own advantages and disadvantages. In order to maximize their respective advantages and achieve complementarity, a coating machine that combines multi-arc technology and magnetron technology has emerged. . In the process, there is a new method of multi-arc plating to make the bottom, then use magnetron sputtering to thicken the coating, and finally use multi-arc plating to achieve the final stable surface coating color.

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