The application of Zhenhua's vacuum coating machine's thin film production technology in electronic products
The application of the thin film production technology of Zhenhua's vacuum coating machine in electronic products mainly includes integrated circuit and semiconductor coating, coating of various display elements, electronic tubes and sensors. The coating of semiconductors and various display elements has been introduced before. This article mainly describes the application of vacuum coating equipment in the field of electronic tubes and sensors.
The detailed coating method of the vacuum coating machine is as follows:
1. Check whether the operation control switches of the vacuum coating equipment are in the "off" position.
2. Turn on the main power switch, and the vacuum coating equipment is powered on.
3. Pull out the low pressure valve. Open the inflation valve. After the airflow sound is not heard, start the rising bell valve, and the bell rises.
4. Install a fixed tungsten spiral heater. Fix the PVDF film and aluminum cover on the rotating disc. Put the aluminum wire into the spiral heater. Clean up all parts of the bell jar to ensure that there is no impurities and dirt.
5. Drop the bell jar.
6. Start the vacuum coating equipment vacuum mechanical pump.
7. Turn on the power of the compound vacuum gauge.
1) Turn the left knob "1" clockwise to point to the heating position of zone 2.
2) The pointer in the low vacuum gauge "2" moves clockwise. When the pointer moves to 110mA, the left knob "1" rotates to point to the measurement position of section 2.
8. When the pointer in the low vacuum gauge "2" moves clockwise to 6.7Pa again, the low pressure valve is pushed in. At this time, the left knob "1" rotates to point to the measurement position of section 1.
9. Turn on the cooling water for the vacuum coating equipment, start the diffusion pump, and heat for 40 minutes.
10. Pull out the low pressure valve. Repeat the action procedure ⑦: turn the lower left knob "1" to point to the measurement position of section 2. The pointer in the low vacuum gauge "2" moves clockwise, when the pointer moves to 6.7Pa, open the high pressure valve.
When the pointer in the low vacuum gauge "2" moves to the right to 0.1Pa, turn on the regulator filament switch.
1) Launch and zero measurement button "9" rotate to point to the launch position.
2) Rotate the lower left knob "1" to point to the measurement position of section 1.
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