Mechini ea sputter deposition, eo hape e tsejoang ka hore ke sistimi ea sputtering, ke lisebelisoa tse ikhethang tse sebelisoang ts'ebetsong ea ho beha lifilimi. E sebetsa ho latela molao-motheo oa ho fafatsa, o kenyelletsang ho otla thepa e lebisitsoeng ka li-ion kapa liathomo tse nang le matla a phahameng. Ts'ebetso ena e ntša letoto la liathomo ho tsoa nthong e shebiloeng, ebe e behoa holim'a substrate ho etsa filimi e tšesaane.
Tšebeliso ea mechine ea sputter deposition e eketsehile haholo ka lebaka la bokhoni ba bona ba ho hlahisa lifilimi tsa bohloeki bo phahameng, ho tšoana ho babatsehang le botenya bo laoloang. Lifilimi tse joalo li na le ts'ebeliso e pharaletseng ho li-microelectronics, optics, lisele tsa letsatsi, mecha ea litaba ea polokelo ea makenete le likarolo tse ling.
Lintlafatso tsa morao-rao lefapheng la mochini oa sputter deposition li hlahisitse ts'ebetso e ntlafalitsoeng le litšobotsi tse ntlafalitsoeng. Tsoelo-pele e hlokomelehang ke ho kenyelletsoa ha theknoloji ea magnetron sputtering, e lumellang hore ho be le litekanyetso tse phahameng tsa deposition le boleng bo ntlafetseng ba filimi. Boqapi bona bo lumella ho beoa ha lisebelisoa tse fapaneng, ho kenyeletsoa litšepe, li-oxide tsa tšepe le li-semiconductors.
Ntle le moo, metjhini ea sputter deposition e se e na le litsamaiso tse tsoetseng pele tsa taolo tse netefatsang taolo e nepahetseng ea liparamente tsa deposition joalo ka khatello ea khase, letsoalo la matla, sebopeho sa sepheo le mocheso oa substrate. Likhatelo-pele tsena li ntlafatsa ts'ebetso ea lifilimi le ho thusa tlhahiso ea lifilimi tse nang le thepa e lumellanang le lits'ebetso tse ikhethileng.
Ntle le moo, nts'etsopele e tsoelang pele lefapheng la nanotechnology le eona e rua molemo haholo ho mechini ea sputter deposition. Bafuputsi ba sebelisa mechini ena ho etsa li-nanostructures le liphahlo tse nang le nanostructured ka nepo e phahameng haholo. Mechini ea sputter deposition e khona ho beha lifilimi tse tšesaane holim'a libopeho tse rarahaneng le libaka tse kholo, e leng se etsang hore e be tse loketseng bakeng sa lits'ebetso tse fapaneng tsa nanoscale.
Haufinyane tjena ho ile ha tlalehoa hore sehlopha sa bo-rasaense ba tsoang setsing se tsebahalang sa lipatlisiso se atlehile ho etsa mochine o mocha oa ho beha li-sputter o ka kenyang lifilimi tse tšesaane ka mokhoa o nepahetseng ho feta leha e le neng pele. Mochini ona oa sejoale-joale o kopanya li-algorithms tsa morao-rao tsa taolo le moralo o mocha oa magnetron ho fihlela sebopeho se phahameng sa filimi le taolo ea botenya. Sehlopha sa lipatlisiso se nahana hore mochini oa sona o tla fetola tšebetso ea tlhahiso ea lisebelisoa tsa elektroniki tsa moloko o latelang le litsamaiso tsa polokelo ea matla.
Ho hlahisa lisebelisoa tse ncha tse nang le ts'ebetso e ntlafetseng ke ts'ebetso e sa khaotseng ea sechaba sa saense. Mechini ea ho beha li-sputter e se e le sesebelisoa sa bohlokoa haholo tlhahlobong ena, e thusang ho sibolloa le ho kopanya lisebelisoa tse ncha tse nang le thepa e ikhethang. Bafuputsi ba sebelisa mechini ena ho ithuta mekhoa ea ho holisa lifilimi, lisebelisoa tsa ho ithuta tse nang le thepa e lokiselitsoeng, le ho fumana lisebelisoa tse ncha tse ka bopang bokamoso ba theknoloji.
-Sengoliloeng sena se lokolloa kemoetsi oa mochine oa vacuum coatingGuangdong Zhenhua
Nako ea poso: Oct-30-2023