Theknoloji ea CVD e itšetlehile ka karabelo ea lik'hemik'hale. Tsela eo li-reactants li leng boemong ba khase 'me e' ngoe ea lihlahisoa e le boemong bo tiileng hangata e bitsoa CVD reaction, kahoo tsamaiso ea eona ea lik'hemik'hale e tlameha ho phethahatsa maemo a mararo a latelang.
(1) Ka mocheso oa mocheso, li-reactants li tlameha ho ba le khatello e lekaneng ea mouoane. Haeba li-reactants li na le khase kaofela mocheso oa kamore, sesebelisoa sa deposition se batla se le bonolo, haeba li-reactants li fetoha ka mocheso oa kamore e nyenyane haholo, e hloka ho futhumatsoa ho etsa hore e fetohe, 'me ka linako tse ling e hloka ho sebelisa khase e tsamaisang ho e tlisa kamoreng ea karabelo.
(2) Ho lihlahisoa tsa karabelo, lintho tsohle li tlameha ho ba boemong ba khase ntle le depositi e lakatsehang, e leng boemong bo tiileng.
(3) Khatello ea mouoane ea filimi e kentsoeng e lokela ho ba tlase ho lekana ho netefatsa hore filimi e kentsoeng e khomaretsoe ka thata ho substrate e nang le mocheso o itseng oa deposition nakong ea karabelo ea deposition. Khatello ea mouoane ea thepa ea substrate mocheso oa deposition le eona e tlameha ho ba tlase ka ho lekaneng.
Li-reactants tsa deposition li arotsoe ka lihlopha tse tharo tse latelang.
(1) Boemo ba khase. Lisebelisoa tsa mohloli tse nang le khase mocheso oa kamore, tse kang methane, carbon dioxide, ammonia, chlorine, joalo-joalo, tse loketseng haholo ho kenngoa ha mouoane oa lik'hemik'hale, 'me lebelo la ho phalla le laoloa habonolo.
(2) Mokelikeli. Lintho tse ling tsa karabelo mochesong oa kamore kapa mocheso o phahameng hanyane, ho na le khatello e phahameng ea mouoane, joalo ka TiCI4, SiCl4, CH3SiCl3, joalo-joalo, e ka sebelisoa ho tsamaisa khase (joalo ka H2, N2, Ar) e phallang holim'a mokelikeli kapa mokelikeli o ka har'a bubble, ebe o kenya mouoane o tletseng oa ntho studio.
(3) Boemo bo tiileng. Ha ho se na mohloli o loketseng oa khase kapa oa metsi, ho ka sebelisoa feela li-feedstocks tse tiileng. Lintho tse ling kapa metsoako ea tsona ka likhato tse makholo li na le khatello e kholo ea mouoane, joalo ka TaCl5, Nbcl5, ZrCl4, joalo-joalo, li ka kenngoa ka har'a studio ho sebelisoa khase e tsamaisang e kentsoeng lealong la filimi.
The ho feta atileng boemo ba mofuta o itseng ka khase e itseng le mohloli lintho tse bonahalang khase-tiileng kapa khase-metsi karabelo, ho thehoa ha likarolo tse loketseng khase ho fana ka studio. Ka mohlala, khase ea HCl le tšepe ea Ga e arabela ho theha karolo ea gaseous GaCl, e isoa setsing sa studio ka mokhoa oa GaCl.
-Sengoliloeng sena se lokolloa kemoetsi oa mochine oa vacuum coatingGuangdong Zhenhua
Nako ea poso: Nov-16-2023