Solvent degreasing of PVC vacuum coating machine in coating process
The grease adhered to the parts of the vacuum equipment can be divided into two types: animal and vegetable oil and mineral oil. Alkaline solutions can be used to chemically remove animal and vegetable oils; organic solvents can be used to remove mineral oils.
However, in practical applications, these two kinds of grease are often present at the same time, so it is often necessary to use multiple different solvents to clean equipment parts.
Three coating targets 6 are placed equidistantly around the outer circle of the main driving roller 3 and located below the main driving roller 6.
In the above technical scheme, the substrate to be plated is received from the unwinding roller through the main driving roller in the vacuum chamber to the winding roller, the vacuum chamber is pumped to a certain degree of vacuum, and the working gas is filled to start The coating control power supply of the vacuum coating machine makes the three coating targets perform reactive sputtering. When the substrate to be plated continuously conveyed by the main driving roller, unwinding roller and winding roller passes through the sputtering area of the three coating targets When the time, the film is deposited on it; the target material sputtered into the vacuum chamber is absorbed by the wave-shaped shielding baffle; by setting the wave-shaped shielding baffle inside the vacuum chamber, it effectively increases the overall area of the baffle. The baffle can better and more adsorb the target material, reduce the number of maintenance, thereby increasing the effective production time of the equipment, for example, the 1000mm*800mm shielding baffle can be changed to a wave-shaped baffle, which can theoretically increase by 25 % Of the baffle area; if the baffle is maintained for 5 times/month, and each maintenance takes 3 hours, if the baffle area is increased by 25%, the maintenance time of 3*5*25%=3.75h can be saved in one month; If the equipment runs at a speed of 0.8m/min, it can increase the production of 0.8*225=180m; if the equipment runs at a speed of 1.2m/min, it can increase the production of 1.2*225=270m.
In the above technical solution, the laying surface of the wave-shaped shielding plate 2 on the inner wall of the vacuum chamber matches the inner wall of the vacuum chamber. In this way, the sputtering target can be absorbed in a larger area without It will reduce the space in the vacuum chamber.
In the above technical solution, the detachable connection between the wave-shaped shielding plate and the inner wall of the vacuum chamber is by bolts 8. In this way, the wave-shaped shielding plate can be easily disassembled and installed.
In the above technical solution, the detachable connection between the wave-shaped shielding plate 2 and the inner wall of the vacuum chamber 1 is: a bending part 21 is provided at the end of the wave-shaped shielding plate 2 and the vacuum chamber The inner wall of 1 is provided with a card slot 11 matching the bending part, and the card slot 11 and the bending part 21 are matched and connected to realize the detachable connection between the wave-shaped shielding plate and the inner wall of the vacuum chamber. In this way, the wave-shaped shielding baffle can be removed and installed more conveniently.
In the above technical solution, the vacuum chamber 1 is provided with a suction hole 13 for connecting a vacuum pumping unit and an inflation hole 14 for connecting a charging system.
In the above technical solution, it also includes a guide roller 7, which is arranged in the vacuum chamber 1, and the guide roller 7 is located between the main driving roller 3 and the unwinding roller 4, and between the main driving roller 3 and the winding roller 5. ; Guide rollers can guide the substrate to be plated so that it can run accurately in the vacuum chamber.
Although the embodiments of the present utility model have been disclosed as above, it is not limited to the applications listed in the description and the embodiments. It can be applied to various fields suitable for the present utility model. Additional modifications can be easily implemented, so without departing from the general concept defined by the claims and equivalent scope, the present invention is not limited to the specific details and the illustrations shown and described here.
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