Mashiinka daahan vacuum ee nidaamka bamgareynta ayaa leh shuruudaha aasaasiga ah ee soo socda:
(1) Nidaamka vacuum ee daahan waa in uu leeyahay heerka bamgareynta ku filan oo weyn, kaas oo aan si degdeg ah u soo saarin gaasaska laga sii daayo substrate-ka iyo walxaha la uumibaxay iyo qaybaha qolka vacuum inta lagu jiro habka daahan, laakiin sidoo kale waxay awoodaan inay si degdeg ah u soo saaraan gaasaska laga sii daayo geeddi-socodka daahan iyo ion , iyo sidoo kale daadinta gaaska geeddi-socodka daahan iyo nidaamka ion.
Diidashada gaaska inta lagu jiro habka sputtering iyo daahan ion sidoo kale si degdeg ah ayaa loo soo saari karaa. Si loo hagaajiyo wax soo saarka mashiinka daahan, waa in ay awood u leedahay in ay si dhakhso ah u shaqeyso.
(2) Faakuumka ugu dambeeya ee nidaamka bamgareynta mashiinka daahan waa inuu ka duwan yahay shuruudaha filimada kala duwan. Jadwalka 7-9 waa kala duwanaanshaha heerka vacuum ee looga baahan yahay habka daahan ee filimada kala duwan.
(3) In bamka faafinta saliidda sida nidaamka bamka weyn ee bamka u baahan yahay bamka ee heerka soo celinta saliid waa sida ugu yar ee suurtogalka ah, sababtoo ah uumiga saliid soo celinta wasakhayn doonaa dusha workpiece iyo sabab u ah tayada filimka hoos u. Shuruudaha tayada filimku waxay si gaar ah ugu sarreeyaan geeddi-socodka daboolka, waxaa ugu wanaagsan in la isticmaalo nidaamka bamgareynta saliidda. Marka la isticmaalayo nidaamka bamgareynta faafinta saliidda, waa in lagu dhejiyaa dabin adsorption godka bamka, dabinka qabow iyo qaybaha kale, iyo waa in fiiro gaar ah conductivity ee qaybaha si loo hubiyo in nidaamka vacuum si ay u ilaaliyaan xawaaraha bamka ugu badan.
(4) Heerka daadinta qolka dahaarka faakuumka iyo nidaamkeeda bamgaraynta waa inay ahaataa mid yar, ie, xataa haddii ay tahay daadinta gaaska raadraaca, waxay saamaynaysaa tayada filimka. Sidaa darteed, si loo hubiyo waxqabadka shaabadda ee nidaamka, wadarta heerka daadinta nidaamka waa in lagu xaddidaa xadka la oggol yahay.
(5) Hawlgalka nidaamka vacuum, isticmaalka iyo dayactirka waa inuu noqdaa mid ku habboon, xasilloon oo waxqabad la isku halleyn karo.
–Maqaalkan waxa soo saaraysoo saaraha mashiinka daahan vacuumGuangdong Zhenhua
Waqtiga boostada: Dec-14-2023