Daahan Vacuum inta badan waxaa ka mid ah kaydinta uumiga vacuum, daahan sputtering iyo daahan ion, kuwaas oo dhan waxaa loo isticmaalaa in lagu shubo biraha kala duwan iyo filimada non-birta dusha ee qaybaha caag ah by distillation ama sputtering hoos xaaladaha vacuum, taas oo ka heli kartaa daahan dusha aad dhuuban faa'iido cajiib ah adhesion degdeg ah, laakiin qiimihiisu sidoo kale waa sare, iyo noocyada biraha loo isticmaalo waa ka yar yahay shaqada, iyo guud ahaan noocyada biraha loo isticmaalo waa shaqo ka yar.
Dhigista uumiga Vacuum waa hab lagu kululeeyo birta hoostiisa faakuum sare, samaynta dhalaalaysa, uumibaxa, iyo samaynta filim bir khafiif ah oogada sambalka ka dib qaboojinta, dhumucdiisuna waa 0.8-1.2 um. Waxay buuxisaa qaybaha yar yar ee isku-dhafka ah iyo kuwa isku dhafan ee dusha sare ee alaabta la sameeyay si loo helo muraayad u eg.Marka la sameeyo uumiga faakuumka ama si loo helo saameyn muraayad ah ama in la nadiifiyo birta leh dhejis hooseeya, dusha hoose waa in la daboolaa.
Tuuritaanka inta badan waxaa loola jeedaa sputtering magnetron, taas oo ah habka xawaare sare ee heerkulka hoose. Nidaamku wuxuu u baahan yahay faaruq ah oo ku saabsan 1 × 10-3Torr, taas oo ah 1.3 × 10-3Pa vacuum state oo ay ka buuxaan argon gaaska inert (Ar), iyo inta u dhaxaysa substrate caag ah (anode) iyo bartilmaameedka birta (cathode) oo lagu daray koronto-sare toos ah oo toos ah, sababtoo ah kicinta elektaroonigga ah ee gaaska qallafsan ee ay ka soo baxaan iyaga oo dhalaalaya, soo saarista balaasmaha, soo saarista balaasmaha on substrate caag ah. Inta badan dahaarka guud ee birta ah waxay adeegsadaan sputtering DC, halka walxaha dhoobada ah ee aan shaqaynayn ay isticmaalaan RF AC sputtering.
Dahaarka Ion waa hab ka soo baxa gaaska loo isticmaalo in qayb ahaan ionize gaaska ama walaxda la uumibixiyey ee xaaladaha faakuumka, iyo walaxda la uumibixiyey ama falcelinteeda waxaa lagu shubaa substrate iyada oo la duqeeyo ions gaaska ama ions ee walaxda la uumibixiyey. Kuwaas waxaa ka mid ah daahan magnetron sputtering ion, daahan fal-celinta ion, daahan dheecaanka cathode godan (habka bannaan ee uumiga cathode meel bannaan), iyo daahan multi-arc ion (cathode arc ion daahan).
Magnetron-ka toosan ee laba-geesoodka ah ee dahaarka joogtada ah ee safka ku jira
Codsasho ballaaran, waxaa loo isticmaali karaa alaabada elektiroonigga ah sida lakabka gaashaanka ee qolofka qolofka EMI, alaab guri, iyo xitaa dhammaan alaabooyinka koobka laambada ee cabbir dhererka go'an waa la soo saari karaa. Awood rarid weyn, isku dhejin is haysta iyo isku dhejinta koobabka iftiinka koonka ah ee dahaarka laba-geesoodka ah, kaas oo yeelan kara awood rarid weyn. Tayada xasilan, joogtaynta wanaagsan ee lakabka filimka laga bilaabo dufcad ilaa dufcad. Heer sare oo otomaatig ah iyo kharashka shaqada oo socda oo hooseeya.
–Maqaalkan waxa soo saaraysoo saaraha mashiinka daahan vacuumGuangdong Zhenhua
Waqtiga boostada: Jan-23-2025