CVD tekinoroji yakavakirwa pamakemikari anoita. Mabatiro anoita mareactants ari mugaseous state uye chimwe chezvigadzirwa chiri chakasimba chinowanzonzi CVD reaction, saka kemikari yayo yekuita system inofanirwa kuzadzisa matatu anotevera mamiriro.
(1) Pakupisa tembiricha, mareactants anofanirwa kunge aine mhute yakakwira yakakwana. Kana mareactants ese ari gasi pamhepo tembiricha, deposition mudziyo iri nyore, kana reactants ari kusagadzikana pakamuri tembiricha iri idiki kwazvo, inoda kudziyisa kuti iite kuvhurika, uye dzimwe nguva inoda kushandisa inotakura gasi kuti iuye nayo kukamuri yekuita.
(2) Pazvinoita zvigadzirwa, zvinhu zvese zvinofanirwa kunge zviri mune gasi mamiriro kunze kweinodiwa dhipoziti, iri mune yakasimba mamiriro.
(3) Iyo mhute yekumanikidza yefirimu rakaiswa inofanira kunge yakadzikira zvakakwana kuti ive nechokwadi chekuti firimu rakaiswa rakanamirwa zvakasimba kune substrate ine imwe tembiricha yekuisa panguva yekuisa maitiro. Iyo vapor pressure ye substrate material pa deposition tembiricha inofanirawo kunge yakadzikira zvakakwana.
Iyo deposition reactants yakakamurwa kuita matatu makuru anotevera.
(1) Gaseous state. Kunobva zvinhu zvine gasi pane tembiricha yekamuri, senge methane, carbon dioxide, ammonia, chlorine, nezvimwewo, izvo zvinonyanya kubatsira kune kemikari vapor deposition, uye iyo chiyero chekuyerera chinodzorwa nyore.
(2) Mvura. Zvimwe zvinhu zvinobatika pakamuri tembiricha kana tembiricha yakakwira zvishoma, kune mhute yakakwira, senge TiCI4, SiCl4, CH3SiCl3, nezvimwewo, inogona kushandiswa kutakura gasi (senge H2, N2, Ar) inoyerera nepamusoro pemvura kana mvura iri mukati mebubble, uye wozotakura hupfu hwechinhu uchipinda mu studio.
(3) Chimiro chakasimba. Kana pasina gasi rakakodzera kana remvura sosi, chete solid-state feedstocks inogona kushandiswa. Zvimwe zvinhu kana makomisheni azvo mumazana emadhigirii ane mhute yakawandisa, seTaCl5, Nbcl5, ZrCl4, nezvimwewo, inogona kutakurwa ichiiswa mu studio uchishandisa gasi rinotakura rakaiswa muchikamu chefirimu.
Iyo yakanyanya kujairika mamiriro emhando kuburikidza neimwe gasi uye sosi yezvinhu gasi-yakasimba kana gasi-mvura kuita, kuumbwa kweakakodzera gasi zvikamu kune studio kuendesa. Semuyenzaniso, HCl gasi nesimbi Ga inobata kuumba gaseous component GaCl, iyo inotakurwa kuenda ku studio nenzira yeGaCl.
-Chinyorwa ichi chakaburitswa navacuum coating machine mugadziriGuangdong Zhenhua
Nguva yekutumira: Nov-16-2023