Ubuhanga bwa CVD bushingiye kumikorere ya chimique. Imyitwarire aho reaction iba iri muri gaze kandi kimwe mubicuruzwa bimeze neza mubisanzwe byitwa CVD reaction, kubwibyo sisitemu yimiti igomba kuba yujuje ibintu bitatu bikurikira.
(1) Ku bushyuhe bwo guta, reaction zigomba kugira umuvuduko mwinshi uhagije. Niba reaction zose ari gaze mubushyuhe bwicyumba, igikoresho cyo kubitsa kiroroshye cyane, niba reaction zidahindagurika mubushyuhe bwicyumba ni gito cyane, gikeneye gushyuha kugirango gihindurwe, kandi rimwe na rimwe gikenera gukoresha gaze yikigo kugirango kizane mubyumba byabigenewe.
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. Umuvuduko wumwuka wibikoresho bya substrate kubushyuhe bwo kugabanuka nabyo bigomba kuba bike bihagije.
Imyitozo yo kubitsa igabanyijemo leta eshatu zikurikira.
(1) Imiterere ya gaze. Ibikoresho bikomoka kuri gaze mubushyuhe bwicyumba, nka metani, dioxyde de carbone, ammonia, chlorine, nibindi bifasha cyane imyuka iva mumyuka, kandi igipimo cy umuvuduko ukagenda neza.
(2) Amazi. Bimwe mubintu byitwara mubushyuhe bwicyumba cyangwa hejuru yubushyuhe buke, hariho umuvuduko mwinshi wumuyaga, nka TiCI4, SiCl4, CH3SiCl3, nibindi, birashobora gukoreshwa mugutwara gaze (nka H2, N2, Ar) itemba hejuru yubuso bwamazi cyangwa mumazi imbere yibibyimba, hanyuma ukajyana imyuka yuzuye mubintu muri studio.
(3) Igihugu gikomeye. Mugihe habuze isoko ya gaz ikwiye cyangwa yamazi, gusa ibyokurya bya leta bikomeye birashobora gukoreshwa. Ibintu bimwe cyangwa ibiyigize muri dogere amagana bifite umuvuduko mwinshi wumuyaga, nka TaCl5, Nbcl5, ZrCl4, nibindi, birashobora kujyanwa muri studio ukoresheje gaze yabatwara yashyizwe mububiko bwa firime.
Ubwoko bwibintu bikunze kugaragara binyuze muri gaze runaka hamwe nisoko ya gaze-ikomeye cyangwa gazi-yamazi ya reaction, gushiraho ibice bya gaze bikwiye kugirango sitidiyo itangwe. Kurugero, gazi ya HCl nicyuma Ga bifata gukora gaze ya gaze ya GaCl, ijyanwa muri studio muburyo bwa GaCl.
–Iyi ngingo yasohowe naimashini ikora imashiniGuangdong Zhenhua
Igihe cyo kohereza: Ugushyingo-16-2023