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Research on the technology of obtaining ultra-high vacuum of PVD vaccum coating equipment

Research on the technology of obtaining ultra-high vacuum of PVD vaccum coating equipment

2021-02-06

Research on the technology of obtaining ultra-high vacuum of PVD vaccum coating equipment

After 1970, scientists in the Soviet Union carried out technical research on the acquisition of ultra-high vacuum through the two main methods mentioned above, and reached a vacuum pressure environment level of 10⁻¹⁰Pa~10⁻¹¹pa.


PVD vacuum coating machine




In order to achieve the above object, the present invention provides the following technical solutions: a multifunctional integrated vacuum coating machine, including a vacuum coating machine body, the outside of the vacuum coating machine body is provided with a heat dissipation shell, one of the heat dissipation shells A supplemental air box is fixedly installed on the side, and a supplemental air dust collector and a supplemental air pump are respectively arranged inside the supplementary air box. The supplemental air dust collector is in communication with the supplemental air pump. The top of the supplemental air pump is fixedly connected with a through-air supplementary box And the air pipe of the heat dissipation housing, the other side of the heat dissipation housing is fixedly connected with a ventilation pipe, a water trough is arranged between the ventilation pipe and the heat dissipation housing, and a heat dissipation fan and a card are respectively arranged inside the ventilation pipe A groove and a sponge metal mesh, the outside of the ventilation pipe is provided with a gap that matches the sponge metal mesh, and the sponge metal mesh is connected with the water tank, and one side of the sponge metal mesh is fixedly installed with a fixing block, A mounting groove is provided on the upper surface of the mounting groove, a limit ring and a spring are arranged inside the mounting groove, the limit ring is located directly above the spring, and the inside of the limit ring and the spring are jointly provided with a movable block penetrating through the fixed block The movable rod corresponds to the slot.


   Preferably, a pull ring is fixedly connected to the lower end of the movable rod, and a rubber sleeve is sleeved on the outside of the pull ring.


Preferably, a base is fixedly installed at the bottom of the heat dissipating shell, four grooves are uniformly opened on the lower surface of the base, and a limit groove is opened on the inner side of each groove, and the inner side of the groove The upper surface of the cavity is rotatably connected with a threaded column, the outer side of the threaded column is screwed with a threaded tube, and the outer side of the threaded tube is fixedly installed with a limiting block matching the limiting groove.


   Preferably, a foot support is fixedly installed at the lower end of the threaded tube, and an anti-skid pad is fixedly installed on the lower surface of the foot support.


   Preferably, a gear and a gear ring are respectively sleeved on the outer side of the threaded column, the gear ring is meshed with the gear, and an operating rod is fixedly installed on the outer side of the gear ring.


   Preferably, the tooth pitch of the gear is 0.2 mm, and the gear and the threaded column are fixed by welding.


   Compared with the prior art, the beneficial effects of this utility model are as follows:


1. In the utility model, the lower end of the sponge metal mesh is inserted into the water tank through the gap, and the upper end is fixed by the movable rod and the slot. By pulling the pull ring downward, the spring is compressed, so that the upper end of the movable rod is separated from the interior of the slot , To achieve the effect of easy disassembly of the sponge metal mesh, and easy maintenance.


2. The utility model is provided with a threaded column and a threaded tube at the bottom of the base. By rotating the operating rod, the threaded column connected by the ring gear and the gear is driven to rotate. At the same time, it cooperates with the limit block and the limit groove to facilitate the control of the thread on the outside of the threaded column The lifting of the tube changes the support height of the foot support, which can be applied to uneven ground and facilitate stable placement.


  Explanation


   Figure 1 is a schematic diagram of the structure of the utility model;


   Figure 2 is a partial enlarged view of part a of the utility model;


   Figure 3 is a partial enlarged view of part b of the utility model.


In the picture: 1. Base; 2. Heat dissipation shell; 3. Air supplement dust collector; 4. Air supplement box; 5. Air supplement pump; 6. Air pipe; 7. Vacuum coating machine body; 8. Water tank; 9. Ventilation pipe 10. Cooling fan; 11. Sponge metal mesh; 12. Notch; 13. Pull ring; 14. Card slot; 15. Movable rod; 16. Limit ring; 17. Spring; 18. Mounting groove; 19. Gear; 20. Operating rod; 21. Groove; 22. Threaded tube; 23. Foot support; 24. Limit slot; 25. Limit block; 26. Threaded post; 27. Gear ring; 28. Fixed block.


  Detailed ways


The following will clearly and completely describe the technical solutions in the embodiments of the present utility model in conjunction with the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, not all implementations. example. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative work shall fall within the protection scope of the present utility model.


   Example 1:


Please refer to Figure 1-3, a multi-functional integrated vacuum coating machine, including a vacuum coating machine body 7, a heat dissipation shell 2 is provided on the outside of the vacuum coating machine body 7, and an air supplement is fixed on one side of the heat dissipation shell 2 The inside of the box 4 and the air supply box 4 are respectively provided with an air supply dust collector 3 and an air supply pump 5, the air supply dust collector 3 is connected to the air supply pump 5, and the top of the air supply pump 5 is fixedly connected with the air supply box 4 and the heat dissipation shell 2 of the air pipe 6, the other side of the heat dissipation housing 2 is fixedly connected with a ventilation pipe 9, a water groove 8 is provided between the ventilation pipe 9 and the heat dissipation housing 2, and a heat dissipation fan 10 and a card slot are respectively provided inside the ventilation pipe 9 14 and the sponge metal mesh 11, the outside of the ventilation pipe 9 is provided with a gap 12 that matches the sponge metal mesh 11, and the sponge metal mesh 11 is connected to the sink 8, and a fixing block 28 is fixedly installed on one side of the sponge metal mesh 11. The upper surface of 28 is provided with a mounting groove 18, the inner side of the mounting groove 18 is provided with a limit ring 16 and a spring 17. The limit ring 16 is located directly above the spring 17, and the inner side of the limit ring 16 and the spring 17 are both provided with a through fixing The movable rod 15 and the movable rod 15 of the block 28 correspond to the slot 14.


   Please refer to Figure 2, the lower end of the movable rod 15 is fixedly connected with a pull ring 13, and the outer side of the pull ring 13 is sleeved with a rubber sleeve, which increases the comfort of using the pull ring 13 and facilitates the pulling of the movable rod 15.


1 and 3, the bottom of the heat dissipation housing 2 is fixedly installed with a base 1. The lower surface of the base 1 is evenly provided with four grooves 21, and the inner side of each groove 21 is provided with a limit slot 24, and the concave The upper surface of the inner cavity of the groove 21 is rotatably connected with a threaded post 26. The outer side of the threaded post 26 is screwed with a threaded tube 22. The outer side of the threaded tube 22 is fixedly installed with a limit block 25 matching the limit slot 24, which can adapt to unevenness. The ground is convenient for the stable placement of the coating machine.


  Please refer to Figure 3, the lower end of the threaded tube 22 is fixedly installed with a foot support 23, and the lower surface of the foot support 23 is fixedly installed with an anti-skid pad to increase the friction between the foot support 23 and the ground and make it stable.


3, the outer side of the threaded column 26 is respectively sleeved with a gear 19 and a gear ring 27, the gear ring 27 meshes with the gear 19, and the outer side of the gear ring 27 is fixedly installed with an operating rod 20 to facilitate the rotation of the threaded column 26 and operation Convenience.


   Please refer to Fig. 3, the tooth pitch of the gear 19 is 0.2mm, and the gear 19 and the threaded column 26 are fixed by welding, so that the gear 19 and the threaded column 26 are firmly connected.


Working principle: Before use, place the coater steadily, use the operating lever 20 to rotate the gear ring 27, drive the threaded column 26 connected to it through the gear 19 to rotate, and drive the outer threaded tube 22 in the limit slot 24 and limit block Under the action of 25, it is raised and lowered, thereby changing the supporting height of the corresponding foot support 23, so that the coating machine is placed stably. When in use, start the air supplement dust collector 3, the air supplement pump 5 and the cooling fan 10, and the air after dust removal passes through the gap between the vacuum coater body 7 and the heat dissipation shell 2 to reach the ventilation pipe 9, and finally passes through the sponge metal with moisture The net 11 is discharged into the air to realize the heat dissipation of the vacuum coating machine body 7. When the sponge metal mesh 11 needs to be disassembled, use the pull ring 13 to pull the movable rod 15 so that the limit ring 16 on the outside of the movable rod 15 compresses the spring 17, and the upper end of the movable rod 15 separates from the inside of the slot 14, tilt the sponge metal mesh 11 to a certain degree Angle to pull it out.


Although the embodiments of the present invention have been shown and described, for those of ordinary skill in the art, it will be understood that various changes and modifications can be made to these embodiments without departing from the principle and spirit of the present invention. , Replacements and modifications, the scope of the present invention is defined by the appended claims and their equivalents.

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