Industry information

Home  > INFO CENTER  > Industry information  > 

Related introduction of electron beam evaporation coating machine

Related introduction of electron beam evaporation coating machine

2022-03-02

Related introduction of electron beam evaporation coating machine







Electron beam evaporators are based on the physical vapor deposition (PVD) technology of electron beam evaporation, which uses electron beams under vacuum to directly heat the evaporated material (usually particles) and transport the evaporated material to a substrate to form a thin film. Electron beam evaporation can deposit high-purity, high-precision thin films.


The working process of the electron beam evaporation coating machine: The electron beam evaporation coating machine is based on the evaporation of tungsten wire. A current of about 5 to 10 kV is passed through a tungsten filament (located outside the buildup area to prevent contamination) and heated to the point where electron thermionic emission occurs. Electrons are focused and directed towards the evaporated material (placed in a crucible) using a permanent magnet or electromagnet. As the electron beam hits the surface of the evaporative pellet, its kinetic energy is converted into heat, releasing high energy (more than megawatts per square inch). Therefore, the hearth containing the evaporating material must be water-cooled to prevent melting.


The difference between electron beam evaporation coating machine and thermal evaporation coating machine: The difference between electron beam evaporation coating machine and thermal evaporation coating machine is: Electron beam evaporation coating machine uses a beam of electrons to bombard objects to generate high energy for evaporation, and thermal evaporation is heated complete the process. Compared with thermal evaporation coaters, electron beam evaporation coaters provide high energy; but it will be difficult to control the thickness of the film to the order of 5nm. In this case, a good thermal evaporator with a thickness monitor would be more appropriate.


Compared with thermal evaporation coaters, the advantages of electron beam evaporation coaters: Electron beam evaporation coaters can heat materials to higher temperatures than thermal evaporation coaters. This allows for very high packing rates and evaporation of high temperature materials and refractory metals such as tungsten, tantalum or graphite.


Electron beam evaporation coaters are capable of depositing thinner, higher-purity films. Water cooling of the crucible tightly confines the electron beam heating to the area occupied only by the source material, thereby eliminating any unnecessary contamination of adjacent components.


Evaporation sources for e-beam coaters are available in a variety of sizes and configurations, including single or multi-chamber.


Chat Online 编辑模式下无法使用
Chat Online inputting...