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PVD vacuum coating equipment thin film production applied on the substrate

PVD vacuum coating equipment thin film production applied on the substrate

2021-02-25

PVD vacuum coating equipment thin film production applied on the substrate


PVD vacuum coating equipment


In recent years, the film production of PVD vacuum coating machine has also applied auxiliary means such as electric field, magnetic field, and ion beam bombardment on the substrate. The purpose is to control the quality and performance of the film formed by the suspected polymer. According to the basic principles of the film forming method, it can be divided into physical vapor deposition, chemical vapor deposition, and plasma enhanced chemical vapor deposition with both physical and chemical methods.







Summary of the invention


In view of this, the present invention provides a vacuum coating machine cleaning equipment with simple structure and convenient use. A cleaning equipment for a vacuum coating machine is used to clean the cooling pipelines in the parts of the vacuum coating machine. The cleaning equipment for the vacuum coating machine includes a liquid storage device. The liquid storage device includes a liquid storage cavity, a liquid outlet pipe and a liquid return pipe. The liquid outlet pipe and the liquid return pipe are respectively provided with a number of liquid outlet branch pipes. The liquid return pipe is provided with a number of liquid return branch pipes. The liquid outlet branch pipe is connected with one end of the cooling pipeline in the vacuum coating machine. The other end of the path is connected, and one end of the liquid storage device is connected with a high-pressure gas pump. Compared with the prior art, the cooling pipeline cleaning equipment for cleaning vacuum coating machine provided by the present invention can effectively remove the corrosives deposited in the cooling pipelines of vacuum coating machine components, can significantly shorten the equipment maintenance period and reduce maintenance costs, and save Time cost and labor cost.


   Figure 1 is an overall schematic diagram of the cleaning equipment of the vacuum coating machine of the present invention. Symbol description of main components


  Rights request


1. A vacuum coating machine cleaning equipment for cleaning the cooling pipelines of vacuum coating machine components, characterized in that: the vacuum coating machine cleaning equipment includes a liquid storage device, which includes a liquid storage cavity and a liquid outlet pipe And the liquid return pipe. The liquid return pipe and the liquid return pipe are respectively provided with a plurality of liquid return branch pipes, and the liquid return pipe is provided with a plurality of liquid return branch pipes. The liquid return pipe is communicated with the other end of the cooling pipeline, and one end of the liquid storage device is connected with a high-pressure air pump to fill the liquid storage cavity with high pressure gas, so that the liquid outlet pipe and the liquid return pipe are filled with cleaning liquid.


2. The vacuum coating machine cleaning equipment according to claim 1, characterized in that: the liquid storage device is provided with a replenishment valve and an inflation valve respectively, and the replenishment valve controls the replenishment of cleaning liquid into the liquid storage cavity of the liquid storage device , The gas filling valve is connected with a high-pressure gas pump for filling gas into its liquid storage cavity.


3. The vacuum coating machine cleaning equipment according to claim 1, characterized in that: the roots of the liquid outlet pipe and the liquid return pipe of the liquid storage device are respectively provided with an outlet pipe valve and a liquid return pipe valve, and The valve is used to control the entry and exit of the cleaning liquid in the liquid storage cavity of the liquid storage device.


  4. The vacuum coating machine cleaning equipment according to claim 1, wherein the parts to be cleaned in the vacuum coating equipment are the target, the wall of the reaction chamber and the pump set.


   Full text abstract


A cleaning equipment for a vacuum coating machine is used to clean the cooling pipeline in the parts of the vacuum coating machine. The cleaning equipment includes a liquid storage device. The liquid storage device includes a liquid storage cavity, a liquid outlet pipe, and a liquid return pipe. A plurality of liquid return branch pipes are respectively arranged on the liquid return pipe, and a plurality of liquid return branch pipes are arranged on the liquid return pipe. Connected, one end of the liquid storage device is connected with a high-pressure air pump. The invention overcomes the problem of poor cooling effect of the coating chamber of the cleaning equipment of the traditional vacuum coating machine, and has low processing cost.


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