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PVD sputtering coating machine stops vacuuming without affecting the material outgassing process

PVD sputtering coating machine stops vacuuming without affecting the material outgassing process

2021-01-09

PVD sputtering coating machine stops vacuuming without affecting the material outgassing process


Stopping the vacuum will not affect the material out-gassing process. The characteristic of material out-gassing is that once the material, structure and temperature are determined, within a certain pressure range, the reduction of material out-gassing rate mainly depends on the out-gassing time, and has nothing to do with the pumping speed and the degree of vacuum. Therefore, continuous evacuation cannot promote a faster reduction in the out-gassing rate. In the case of intermittent evacuation, the "certain pressure range" that does not affect the out-gassing of the material in the insulation layer of the vacuum device is maintained during the stop of the evacuation, and does not affect the out-gassing process, so the out-gassing rate can continue to decrease with time.











Please refer to the equipment manual for the specific operation of the vacuum coating machine operating procedure


   and the instrument panel pointer display on the device and the label description under each knob.


  ① Check whether the operation control switches of the vacuum coating machine are in the "off" position.


  ② Turn on the main power switch, and the equipment is powered on.


  ③ The low pressure valve is pulled out. Open the inflation valve. After the airflow sound is not heard, start the rising bell valve and the bell rises.


  ④ Install a fixed tungsten spiral heater. Fix the PVDF film and aluminum cover on the rotating disc. Put the aluminum wire into the spiral heater. Clean all parts in the bell jar to ensure that there is no impurities and dirt.


  ⑤ Drop the bell jar.


  ⑥ Start the vacuum mechanical pump.


  ⑦ Turn on the power of the compound vacuum gauge (composite vacuum gauge model: Fzh-1A).


  A. Rotate the left knob "1" clockwise to the heating position of zone 2.


  B. The pointer in the low vacuum meter "2" moves clockwise, when the pointer moves to 110mA, the left knob "1" rotates to point to the measurement position of section 2.


  ⑧ When the pointer in the low vacuum gauge "2" moves clockwise to 6.7Pa again, the low pressure valve is pushed in. At this time, the left knob "1" rotates to point to the measurement position of section 1.


  ⑨ Turn on the cooling water for the vacuum coating machine, start the diffusion pump, and heat for 40 minutes.


  ⑩ The low pressure valve is pulled out. Repeat the action procedure ⑦: turn the lower left knob "1" to point to the measurement position of section 2. The pointer in the low vacuum gauge "2" moves clockwise, when the pointer moves to 6.7Pa, open the high pressure valve (the valve stem rotates clockwise).


  ? When the pointer in the low vacuum gauge "2" moves to the right to 0.1Pa, turn on the regulator filament switch.


  A. Launch and zero measurement button "9" rotate to point to launch position.


  B. Rotate the lower left knob "1" to point to the measurement position of section 1.


  ? Rotate the emission control knob "4" to make the pointer of the high-pressure vacuum gauge "5" point to 5.


  ? Launch, zero, and measure knob "9" rotate to point to the zero position.


  ? Rotate the zero point adjustment knob "10" to make the pointer of the high-pressure vacuum gauge "5" point to the 0 position.


  ? Transmit, zero, and measure knob "9" rotate to point to the measurement position.


  ? Turn the standard adjusting knob "3" to make the pointer of the high pressure vacuum gauge "5" point to 10.


Rotate the "doubler" switch knob "8" to point to 10-12, when the pointer in the high-pressure vacuum gauge "5" moves counterclockwise to the left more than 1, then turn the "doubler" switch knob "8" to point to 10- 3.


  ? When the pointer of the high-pressure vacuum gauge "5" moves counterclockwise and exceeds 6.7Pa, turn on the workpiece rotary switch, and the PVDF film of the plated part in the bell jar rotates.


  ? Turn on the evaporation switch. Insert the current sub-plug into the distribution hole of the evaporation electrode (there are 1, 2, 3, 4 holes, which can be inserted into any hole).


  ? Rotate the right hand wheel of the right pressure regulator with your right hand and slowly rotate to increase the pressure.


  A. Observe the color change of the heating temperature of the tungsten spiral heater from the sight glass window.


  B. When the color of the tungsten spiral heater turns yellow-orange and the aluminum wire starts to melt, operate the baffle button with the left hand to remove the upper baffle of the tungsten spiral.


  C. All the aluminum wires melt and evaporate, and the baffle plate returns to its original position.


  D. Rotate the regulator hand cycle with the right hand to the zero position. The first evaporation work is completed.


  21. If you want to vaporize again (in order to increase the thickness of the electrode metal layer): Pull out the current sub-plug and insert it into another electrode distribution hole. Repeat the operation.


   22. Turn off the regulator filament switch. Close the high pressure valve (turn the handle counterclockwise). Turn off the workpiece rotation. Turn off evaporation. Rotate the mechanical pump knob to point to the diffusion pump position.


  23. The low pressure valve is pulled out. The bell jar is inflated. Inflate for a period of time, when there is no sound, raise the bell jar.


   24. Aluminum wire is added to the tungsten spiral heater. The PVDF film is replaced with the other side facing down (the original side is coated with an aluminum film facing up). Fastened on the rotating disc.


   25. Falling bell jar. Turn on the mechanical pump.


  A. Rotate the lower left knob "1" to point to the 2 section measurement position.


  B. When the pointer in the low-pressure vacuum gauge "2" moves clockwise to 6.7Pa, push the low-pressure valve in.


  C. Rotate the lower left knob "1" to point to the measurement position of section 1.


  D. When the pointer in the low pressure vacuum gauge "2" moves clockwise to 6.7Pa, open the high pressure valve. Rotate the knob "1" to point to the 2 section measurement position.


  E. When the pointer in the low-pressure vacuum gauge "2" moves clockwise to point to 0.1Pa, turn on the filament.


  F. Repeat the operation from? To?.


  26. After the aluminum layer is deposited on the PVDF film, turn off the gauge filament, high pressure valve, mechanical pump, and diffusion pump in order. Pull out the low pressure valve. The bell jar is inflated, and the bell jar is raised after inflation. Take out the workpiece and do a good job of cleaning the inside of the bell jar.


  A. Drop the bell jar.


  B. Turn on the mechanical pump, pump for 3~5min, and stop the mechanical pump.


  C. Cut off the power supply main switch.


  D. Turn off the cooling water after 1h. The operation is complete.


   27. During normal production, if there is a sudden power failure, immediately cut off the high vacuum measurement, turn off the gauge filament, and pull out the high pressure valve and low pressure valve. After the call, let the mechanical pump start to work for 3~5min before transferring to normal production.

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