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PVD coating principle of ZCK1600 magnetron sputtering coating machine

PVD coating principle of ZCK1600 magnetron sputtering coating machine

2020-09-27

PVD coating principle of ZCK1600 magnetron sputtering coating machine


PVD vacuum coating machine


PVD coating principle of ZCK1600 magnetron sputtering coating machine:After heating or ionization cleaning, negative charge is applied to the cathode coating material, and negative bias is applied to the product if the product substrate is conductive.The deposited material of PVD vacuum coating will be sputtered to the product surface in the form of high energy, and will travel along the product surface until it reaches the preferred nucleation position. Bombarding ions continuously from the source will sputter the deposited material, so you won't encounter the common large edge accumulation problem of the coating.



Common faults and treatment methods of vacuum coating machine


The mask fixture flip signal is not detected:

   1. Check the position of the flipped signal source

  2. Manually short-circuit the flip input signal and use the flip detection function. When the computer can detect the signal, it proves that the problem is on the flip control switch, and handles it accordingly. If no signal is detected, first check the line, and then replace the control card.


The mask jig flip is unstable:

   1. Check whether the initial position of the flap meets the timing

  2. Detect whether the turning control switch is stable, and it can be tracked and monitored with a pointer multimeter.

  3. Check whether the turning mechanism is flexible and reliable

  4. Check the setting of turning signal times

   5. Check whether the rotating worktable is rubbed against the inner wall of the bell jar

  6. Detect the stability of the rotating worktable during rotation


Large frequency dispersion in the same mask fixture:

   1. Check whether the chip itself has a large dispersion

  2. Check whether the position of the film correction plate has changed, and readjust the correction plate

  3. Check whether the baffle completely covers the molybdenum boat when opening and closing

  4. Check whether the bombardment ring completely covers the molybdenum boat

   5. Check whether the molybdenum boat meets the requirements and use a round molybdenum boat


The frequency difference between the pot and the pot is large:

   1. Observe whether there is a frequency hopping phenomenon in the monitoring film

  2. Repeatedly measure the uniform monitoring piece to observe the stability of the oscillator (not exceeding 75Hz)

  3, check whether the cooling water is unblocked

  4. Check whether the molybdenum boat meets the requirements and use a round molybdenum boat

   5. Whether the selection of monitoring film meets the requirements, it is recommended to use our company's monitoring film




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