Program Design for PLC Control of PVD Coating Machine
The program design rules for the PLC control of the PVD coating machine are not static. Depending on the type of PLC, the design rules may be different. This can be done according to the product manual. The program is input to the program memory through the programmer. In addition to the function of inputting the user program, the programmer also has the function of reading, deleting, modifying, inserting, searching and setting constants of the program, and also realizing the monitoring of operating conditions during operation.
The principle of sputtering coating is that under the action of the electric field, the plasma generated by the rare gas in the abnormal glow discharge bombards the surface of the cathode target, sputtering out the molecules, atoms, ions, and electrons on the target surface. The ejected particles have a certain kinetic energy, and are projected toward the surface of the substrate in a certain direction to form a coating on the surface of the substrate.
At present, the sputtering of the target material inside the vacuum chamber cannot be eliminated. The maximum area for the effective adsorption of the target material sputtered by the target material is the internal surface of the vacuum chamber and the shielding plate. The long-term target sputtering will inevitably produce The target material is accumulated on the surface of the shielding plate. When the target material accumulated on the shielding plate reaches a certain thickness, the shielding plate needs to be cleaned; in the prior art, the structure of the shielding plate inside the vacuum chamber is flat, and the flat structure is used for shielding Plate, the target material accumulated in the planar structure is less, and frequent maintenance and cleaning are required, which reduces the utilization efficiency of the vacuum coating machine.
Technology realization factors:
An object of the present invention is to solve at least the above-mentioned problems and/or deficiencies, and to provide at least the advantages described later.
In order to achieve these objectives and other advantages according to the present invention, a vacuum chamber for a vacuum coating machine is provided, including:
wavy shield, which can be detachably connected to the inner wall of the vacuum chamber;
the main drive roller, which is arranged in the center of the lower part of the vacuum chamber; the unwinding roller and the winding roller are symmetrically arranged on the upper part of the vacuum chamber;
Three coating targets, which are placed equidistantly around the outer circle of the main driving roller, and located below the main driving roller.
Preferably, the laying surface of the wave-shaped shielding plate on the inner wall of the vacuum chamber matches the inner wall of the vacuum chamber.
Preferably, the detachable connection between the wave-shaped shielding plate and the inner wall of the vacuum chamber is a bolt connection.
Preferably, the detachable connection between the wave-shaped shielding plate and the inner wall of the vacuum chamber is as follows: a bending part is provided at the end of the wave-shaped shielding plate, and the inner wall of the vacuum chamber is provided with A card slot matching the bending part, and the card slot and the bending part are matched and connected to realize the detachable connection of the wave-shaped shielding plate and the inner wall of the vacuum chamber.
Preferably, the vacuum cavity is provided with a suction hole for connecting a vacuum pumping unit and an inflation hole for connecting an inflation system.
Preferably, it further includes a guide roller, which is arranged in the vacuum chamber, and the guide roller is respectively located between the main driving roller and the unwinding roller, and between the main driving roller and the winding roller.
The utility model at least includes the following beneficial effects: the utility model sets the shielding baffle inside the vacuum chamber as a wave-shaped shielding baffle, which effectively increases the overall area of the baffle, allowing the baffle to absorb more targets better and Material, reduce the frequency of maintenance, thereby increasing the effective production time of the equipment.
Other advantages, objectives and features of the present utility model will be partly embodied by the following description, and partly will be understood by those skilled in the art through the research and practice of the present utility model.
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