Principle and composition analysis of vacuum coating equipment
Vacuum coating machine refers to coatings that need to be carried out in various high vacuum conditions, including vacuum ion evaporation, magnetron sputtering, MBE molecular beam epitaxy, and PLD laser sputtering deposition.
The vacuum coating machine is also the most widely used vacuum equipment for manufacturing vacuum conditions at present. It is generally composed of three parts: a vacuum chamber, a vacuum machine, and an electric control box. . Below, the editor will introduce the principle of vacuum coating machine and the analysis of each part in detail.
1. Vacuum body - vacuum steel According to the requirements of processed products, the size of vacuum steel is also different. At present, the most suitable ones are 1.3 meters, 0.9 meters, 1.5 meters, 1.8 meters and so on.
Made of stainless steel, it is required to be rusted and strong, and each part of the vacuum steel has a connection valve for connecting each pump gun.
Auxiliary air intake system: The exhaust system is an important part of the vacuum system of the coating machine, mainly composed of three parts: mechanical pump, booster pump and oil diffusion pump.
Mechanical pump: Mechanical pump, also known as full-stage pump, is the most widely used low vacuum pump. By maintaining the sealing effect with oil and relying on the method of the machine, the volume of the suction hole in the pump is continuously changed, so that the volume of the gas in the suction container is continuously expanded. , so as to obtain a vacuum.
Classification of mechanical pumps: There are many kinds of mechanical pumps, and there are four commonly used slide valves (mainly suitable for large equipment), piston reciprocating, imposition and rotary chips (the most widely used currently).
However, some problems often occur in the use of the vacuum pump of the vacuum coating machine. Therefore, the vacuum coating machine vacuum pump maintenance experts have summarized the following daily maintenance and maintenance methods of the vacuum coating machine vacuum pump.
1. Check for loose piping and fittings in the rotary vacuum unit. Turn the vacuum pump by hand to see if it is flexible.
2. Add bearing lubricating oil to the bearing body, and observe that the oil level should be at the center line of the oil level standard. Therefore, the oil level should be checked frequently, and if it does not meet the requirements, it should be adjusted to meet the requirements. Lubricating oil should be replaced or supplemented in time.
3. Under normal circumstances, the stainless steel pump needs to be greatly repaired after 2000 hours of operation, check the aging degree of the rubber seal, confirm that the exhaust valve has cracks, and remove the dirt accumulated on the valve plate and exhaust valve seat.
4. Close the gate valve of the water outlet, the outlet pressure gauge and the inlet vacuum gauge.
5. Unscrew the water diversion plug of the vacuum pump body and pour in diversion water or mud.
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