physical properties of al-doped zno films deposited on nonwoven substrates by radio frequence magnetron sputtering.

by:ZHENHUA     2020-09-02
In this study, polybendiester (PET)
Textile non-woven fabric material is used as a substrate for the manufacture of electronic products
Optical functional nano structure of the fiber surface.
Deposition of Al-by magnetic control-doped ZnO (AZO)
Film on non-woven fabric.
The effects of deposition time on the structure, optical and electrical properties of AZO films were investigated.
Atomic force microscope (AFM)
Used to check the terrain of the fiber.
AFM observations showed that there was a significant difference in the morphology of the fibers before and after the AZO sputtering coating.
UV detection-
Visible spectrometer analysis shows that the non-wovens deposited by transparent nano-structure AZO films have better UV absorption and the average transmission ratio in the visible wavelength region is about 50%.
The surface conductivity of the material is analyzed with four-
Probe meter, it was found that the resistance decreased significantly with the increase of the sputtering time.
Key words: non-spinning, RF sputtering, aluminumdoped ZnO (AZO), AFM,UV-
Four-visible splitter
Needle Finder introduction non-woven fabric industry has recently become one of the fastest growing industries in the world.
Due to its rich surface area, fiber network, pores of various sizes, non-woven fabric materials are increasingly used in agriculture, manufacturing, defense and many other fields, as well as properties such as elasticity and permeability.
However, the surface inertia of polymer fibers in non-woven fabrics limits the potential use of these materials in many industries. (1,2)
Researchers and engineers have tried various techniques such as physical vapor deposition (PVD)
Chemical vapor phase deposition, pulse laser deposition, magnetic-controlled sputtering deposition (3-5)
Improve and improve the surface properties of non-woven fabric and expand its application scope.
Due to the advantages of low process temperature, complex chemical combination and multi-layer functional structure, RF sputtering deposition has proved to be one of the most promising technologies to realize the function of textile materials, the bonding strength between the coating and the substrate is higher. (5)Al-doped ZnO (AZO)
In recent years, films deposited on rigid glass bases have been widely studied because they combine attractive properties with high visible transparency and high conductivity. (6)
As we all know, the glass is very heavy and brittle, and it is easy to deform, especially in some applications, such as assmart cards and electronic maps, where flexible and lightweight materials are required. (7)
Therefore, transparent conductive films deposited on flexible polymer substrates can overcome these problems, and it is very important to study the properties of oxide films deposited on polymer substrates (such as non-woven fabrics.
In this report, AZO films are deposited by RF (RF)
Magnetic disc on polyphenyl ester (PET)
Spun non-woven fabric.
Observing the surface morphology of the fiber with atomic force microscope (AFM)
In contact mode
The optical transmission ratio of the sample was measured with anUV-
Visible splitter.
The electrical properties of the sample are four-probe meter.
Commercial PET textile adhesive non-woven experimental materials with a mass of 60g/[per face]m. sup. 2]
Used as a substrate in this study.
Before spraying the coating, ultrasonic cleaning of non-wood samples was performed with ethanol and distilled water.
The sample is dried in the oven of 40 [degrees]
C. 24 hours after washing.
Cut the dry sample into 2 sizes. 5 X 7. 5 c[m. sup. 2]
Used for sputtering coating.
The functional layer of the sputtering coating is based on the sputtering coating system by Shenyang amagnetron smart Co. , Ltd. ,P. R. China.
The goal of use is AZO (
97 zinc + 3 Weight % of Weight % [[Al. sub. 2][O. sub. 3]])target (
Diameter: 50mm, thickness: 4mm)
Installed on the cathode.
PET textile adhesive non-woven fabric samples are fixed on the base plate bracket with a distance of 60mm between the target and the base plate.
The basic pressure of the process chamber is pumped to 5 X [10. sup. -4]
The gas with high purity argon abombardment is used before the bully.
The film thickness was measured online during this process.
Sputtering was carried out at room temperature.
Table 1 lists the details of the sputtering conditions.
Check the surface nano-structure with CSPM 4000 atomic force microscope (ATM)
Provided by the company. , Ltd.
The scanning mode used in this study is contact mode AFM (8,9)
Use a silicon cantilever.
Scan allimage under environmental conditions. XRD An X-
Ray diffraction (XRD)
Analysis using RigakuD/MAX-
2550PCX diffraction with Cu K [alpha]radiation (40 kV, 300 mA)
Identify the crystal phase of the AZO film.
Optical transmission ratio using LAMBDA900 UV-measure the optical properties of the sample
Visible Splitter provided by PerKinElmer--USA.
The scan range is set between 250 and 600 nm.
Resistance using aSX1934 4-measure the electrical properties of the sample
Probe instrument produced by Suzhou Baishen Technology Co. , Ltd. Ltd. Thefour-
The surface resistivity of the sample was measured by the probe meter.
Results and discussion of surface morphology AFM images were obtained through 3. 0 x 3. 0 [micro][m. sup. 2]
As shown in the figure, scan the fiber surface of the original PET non-woven fabric and the sputtering AZO non-woven fabric1.
Figure 1a shows that the surface of the original pet fiber looks smooth, as shown by the typical features of the pet fiber. Figures 1b-
1d showed that the surface properties of PET fiber were significantly changed by AZO sputtering coating. [
Figure 1 slightly]
By AFM analysis, the influence of the sputtering time on the surface morphology of the deposited PET fiber is revealed, under the condition of constant sputtering pressure (0. 5 Pa)
And sputtering power (150 W).
Afm images are listed in the figure. 1b-
1d, the effect of the sputtering time can be clearly seen in the image.
The film thickness is about 50 nm, and the average size of AZO nanoclusters analyzed by AFM is about 47.
Coating 1 nm after 30 minutes.
The thickness of the film increased to about 80 nm and the average grain size increased to 53.
1 nmafter 60 minute coating.
With the increase of film thickness, the tightness and uniformity of carbon films deposited on non-woven fabrics are improved by continuously covering the fiber surface.
The average size of the AZO nanoclusters that were splashed on PET fibers also increased to 53.
When the thickness of the film is further increased to about 100 nm, it is 1 nm.
The nanoclusters look circular and have a more uniform shape, and the thickness of the fiber surface increases as the sputtering deposition time expands to 90 minutes.
This phenomenon can be attributed to nuclear and island formation (6),(7)
Azograin grows on the surface of the fiber.
It is clear that the increase in deposition time uses an increase in film thickness, which leads to the formation of AZO aggregates with large fiber surfaces.
It clearly shows that the size of AZO nanoclusters increases with the increase of the time of the sputtering.
Therefore, it can be concluded that under certain conditions, the sputtering time is the main factor affecting the AZO nano-structure morphology constructed on the surface of non-woven fibers.
Optical properties of ultraviolet rays-
The visible spectrum reveals the effect of the sputtering time on the optical properties of AZO coated non-woven fabrics, as shown in the figure2.
It is clear that in the range of 250 to 600 nm, the transmission ratio curve shows a similar pattern.
From 50 nm to 300 nm, the transmission ratio is very low, indicating the shielding effect of all samples.
With the increase of wavelength, the transmission ratio gradually increases.
When the sputtering time increases from 30 minutes to 90 minutes, the transmission ratio decreases.
This is due to the increase in the thickness of the AZOnanostructure film with the increase of the sputtering time.
The increase in coating thickness leads to a decrease in scattering loss (7).
Figure 2 also shows that the average transmission ratio of AZOcoated samples in the range of 50%-450 exceeds
The 600 nm wavelength shows good properties of the transparency of the AZO coating.
It was also observed that the coating thickness had a significant effect on the transmission ratio of the sample in the wavelength range of 300 to 400 nm, indicating that the AZO coating\'s ability to absorb purple light was positive (UV).
Properties attributed to direct transformation of UV absorption --
Semiconductor--
Optical energy gap of AZO film (10). [
Figure 2:
Electrical properties experimental results show that the structure of azonanofilm depends to a large extent on the parameters of the sputtering coating as shown in the figure3.
It was observed that the room temperature resistance of the sputtering AZO non-woven fabric gradually decreased with the increase of the sputtering time.
The resistance is also reduced to 5. 2 x [10. sup. 3][OMEGA]cm from 50 x [10. sup. 3][OMEGA]
The deposition time increased from 30 minutes to 90 minutes.
The main reason is that the increase in film thickness is caused by the increase in deposition time.
Therefore, with the increase of the thickness of AZO Nano-film, by continuously covering the surface of the fiber to improve the tightness and uniformity of the nano-film deposited on the non-woven fabric.
In addition, the X-ray diffraction diagram in the figure
4 indicate the preferred orientation (002)
For all AZO Nano films deposited on PETnonwovens, it can be clearly observed.
In addition, there is no zinc, aluminum and [Al. sub. 2][O. sub. 3]
Characteristic peaks were detected.
[About 34 diffraction peaks]degrees]
Corresponding to (002)
This plane.
Strength (002)
The peak value increases with the increase of film thickness.
It was also observed that the increase in the thickness of the film resulted in the improvement of the crystal of the film (6),(7)
As shown in the figure. 4a-4c.
The increase in grain size leads to the weakening of scattering between grains, and the improvement of life and fluidity (10)
At the same time, the conductivity of nano-thin films is improved.
On the other hand, the doping atom (Al)
Therefore, the zinc position of azofilm is incorporated into the zinc lattice.
Under the assumption that each dissolved Al atom provides a free electron, the number of free electrons in the film increases as the film thickness increases.
Therefore, it is concluded that under certain conditions, film thickness is the main factor affecting the conductivity of nitrogen oxide structures constructed on non-woven fabrics. [
Figure 3 slightly][
Figure 4 slightly]Conclusion Al-
The doped films were prepared on PETnonwoven materials by RF sputtering.
The surface of the fiber was observed with AFM.
The AFM results show that there is a significant difference in the morphology of the fibers before and after the AZO sputtering coating.
In the range of visible wavelength, the fabric deposited by the transparent nano-structure AZO film shows a high optical transmission ratio of about 50%.
In addition, the non-woven fabric deposited by transparent nano-structure AZO film also has better UV absorption.
With the increase of the sputtering time, the room temperature resistance of the sputtering AZO non-woven fabric gradually decreases.
Thanks to the Ministry of Education for its financial support for key projects (No. 106089)
University\'s training plan for outstanding talents in the new century (NCET-06-0485)
, And open project plan for key laboratory of ecological environmenttextiles (
Jiangnan University)
Ministry of Education, P. R. China, (No. KLET0608)
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Key Laboratory of High ecology
Textile major, Ministry of Education, Jiangnan University, Wuxi 214122, ChinaR. China e-
Email: Wei @ Jiangnanedu.
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