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Performance advantages of electron beam PVD vacuum coating machine

Performance advantages of electron beam PVD vacuum coating machine

2021-08-05

Performance advantages of electron beam PVD vacuum coating machine



PVD vacuum coating machine




Under high vacuum, the electron beam PVD vacuum coating machine emits thermionic electrons, which are accelerated by the accelerated anode, and obtain huge kinetic energy bombarding the evaporation material. The kinetic energy is converted into heat to heat the evaporation material and realize the electron beam evaporation coating. The electron beam coating machine consists of a hot cathode emitting electrons, an electron accelerating electrode and a coating material as an anode. The energy of the electron beam evaporation source can be highly concentrated, so that the coating material locally reaches a high temperature and evaporates. By adjusting the power of the electron beam, the evaporation rate of the coating material can be conveniently controlled, especially for metals and compound materials with high melting point and high purity.


Coating characteristics of electron beam PVD vacuum coating machine


Electron beam PVD vacuum coating machine is a commonly used thin film manufacturing equipment in the industry. Due to the characteristics of the evaporative coating machine, it plays an important role in film production. The film is mainly produced by the heating of the electron beam in the coating machine.


1. The advantages of electron beam PVD vacuum coating machine


(1) The electron beam heating method in the coating machine is compared with the traditional resistance heating method. The electron beam heating will produce a higher flux density, which is conducive to the evaporation of high melting point materials, and can also increase the evaporation rate to a certain extent.


(2) When the electron beam coating machine is working, the raw materials to be evaporated are put into a water-cooled copper crucible, which can prevent the material from being contaminated and produce a high-purity thin film.


The kinetic energy of the particles evaporated by the electron beam is relatively large, which is conducive to the precision and binding force of the film.


2. Disadvantages of electron beam coating machine


The overall structure of the electron beam evaporation coating machine is relatively complicated, and the price is relatively high compared to other coating equipment.


When the coating machine is working, if the vapor density near the evaporation source is relatively high, there will be a certain interaction between the electron beam current and the vapor particles, which will affect the electron flux and cause the electron flux to lose or deviate from the track. At the same time, you may also cause the excitation and ionization of steam and residual gas, which will affect the quality of the entire film.


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