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Part of the gas in the parts of the vacuum coating machine to be inspected is removed to make the vacuum leak detection device have stable working conditions

Part of the gas in the parts of the vacuum coating machine to be inspected is removed to make the vacuum leak detection device have stable working conditions

2020-09-12

Part of the gas in the parts of the vacuum coating machine to be inspected is removed to make the vacuum leak detection device have stable working conditions


PVD vacuum coating machine


The function of the auxiliary vacuum system is to remove part of the gas from the parts of the vacuum coating machine to be inspected. It is a set of devices that enables the vacuum leak detection device to have stable working conditions, as well as clear time and response time. Considering the gas volume of the tested coating equipment components, the auxiliary vacuum system should be required to have a certain pumping speed. The selection of the pumping speed of the auxiliary vacuum system requires comprehensive consideration from the cleaning time and the reaction time. In addition, in order to make the pre-pumping time as short as possible when detecting leaks in large quantities of components, the pumping speed of the auxiliary vacuum system should also be considered from the pumping time of the leak detector.






The utility model relates to the technical field of vacuum coating, in particular to a vacuum system of a vacuum coating machine.


  Background technique:


  Vacuum coating is to vapor-deposit metal aluminum copper and other materials on the surface of a roll-shaped plastic film by heating in a vacuum environment. Vacuum coating equipment is composed of vacuum equipment and vacuum system. The vacuum system mainly uses diffusion pump as the main pump to achieve vacuum.


   Existing vacuum system, regardless of whether the vacuum equipment is in working state or shutdown state, the diffusion pump is in continuous evacuation state. If the vacuum equipment is in a shutdown state, the valve cover above the diffusion pump will fall to cover the air inlet of the diffusion pump, and the diffusion pump will pump itself; when the vacuum equipment is working, the remaining pumps will pre-pump to meet certain conditions. Generally, when it is 3-5Pa, the valve cover above the diffusion pump is lifted, and the diffusion pump pumps the vacuum equipment. In this kind of vacuum system, the diffusion pump continues to work when the vacuum equipment is in a shutdown state, which wastes a lot of electric energy, consumes a lot of energy, and leads to high production costs.


  Technology realization factors:


  The purpose of this utility model is to provide a vacuum system for vacuum coating machine to solve the above technical problems.


  In order to solve the above problems, the technical solution adopted by this utility model is:


A vacuuming system of a vacuum coating machine includes an evacuation mechanism connected to a vacuum chamber through a pipeline, a vacuum detection mechanism and a PLC control system; the evacuation mechanism includes a mechanical pump, a first Roots pump, a second Roots pump, and a diffuser Pump, wherein the mechanical pump, the first roots pump, and the second roots pump are connected to the vacuum chamber through pipelines to form a pre-exhaust air path from the pump body to the vacuum chamber. A roots pump and a diffusion pump are connected to the vacuum chamber by pipelines to form a vacuum air path leading from the pump body to the vacuum chamber, and set on the pipeline between the first roots pump and the second roots pump There is a first valve, a second valve is provided on the pipeline between the first Roots pump and the diffusion pump, and a third valve is provided on the pipeline between the diffusion pump and the vacuum chamber; the second Roots pump is connected to The pipeline between the vacuum chambers is provided with a venting pipe, on which a venting valve is installed; the diffusion pump is connected with a maintenance pump through the pipeline; the vacuum detection mechanism includes a first vacuum gauge, a second vacuum gauge, and a third vacuum gauge. The vacuum gauge and the fourth vacuum gauge, wherein the first vacuum gauge is arranged on the pipeline between the vacuum chamber and the exhaust pipe, the second vacuum gauge is arranged on the pipeline between the maintenance pump and the diffusion pump, and the third vacuum gauge is The four vacuum gauges are arranged on the pipeline between the vacuum chamber and the diffusion pump; the mechanical pump, the first roots pump, the second roots pump, the diffusion pump, the maintenance pump, the first valve, the second valve, and the third valve And the air release valve is respectively connected and controlled by the PLC control system; the first vacuum gauge, the second vacuum gauge, the third vacuum gauge, and the fourth vacuum gauge are respectively connected to the signal input end of the PLC control system; the diffusion pump It is equipped with a power regulator, and the power regulator is connected and controlled by a PLC control system.


Beneficial effects: Compared with the prior art, this utility model is equipped with a power regulator on the diffusion pump, and the power of the diffusion pump is adjusted at any time according to the PLC setting value, which can not only achieve the maintenance of the vacuum state, but also achieve the effect of saving electricity , Reducing energy consumption, while reducing production costs.


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