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optical pvd coating equipment in extremely high vacuum

optical pvd coating equipment in extremely high vacuum

2021-01-24

optical pvd coating equipment in extremely high vacuum



optical pvd coating equipment in a very high vacuum state, the gas has a very small molecular number density (under normal temperature, it is less than 2X10¹²/m³), and the gas molecules have a particularly long mean free path (usually greater than 6.7X10⁶m, depending on the size of the vacuum chamber of the vacuum coating machine The actual free path of gas molecules is equal to the characteristic size of the vacuum chamber of the coating machine).



optical pvd coating equipment







The vacuum system of the vacuum coating machine described in this embodiment includes an vacuum mechanism, a vacuum detection mechanism and a PLC control system connected to the vacuum chamber 1 through a pipeline. among them:


The evacuation mechanism includes a mechanical pump 2, a first roots pump 3, a second roots pump 4, and a diffusion pump 5. The mechanical pump 2, the first roots pump 3, and the second roots pump 4 pass through a pipeline A pre-evacuation path from the pump body to the vacuum chamber 1 is formed between the sequential connection and the vacuum chamber 1. The mechanical pump 2, the first Roots pump 3, and the diffusion pump 5 are connected to the vacuum chamber 1 in sequence by pipelines. A vacuum air path leading from the pump body to the vacuum chamber 1 is formed, and a first valve 6 is provided on the pipeline between the first roots pump 3 and the second roots pump 4, and the first roots pump 3 A second valve 7 is provided on the pipeline between the diffusion pump 5 and the diffusion pump 5 and a third valve 8 is provided on the pipeline between the diffusion pump 5 and the vacuum chamber 1. The pipe between the second Roots pump 4 and the vacuum chamber 1 is provided with a vent pipe 9 and a vent valve 10 is installed on it. A maintenance pump 11 is connected to the diffusion pump 5 through a pipe.


The vacuum detection mechanism includes a first vacuum gauge 12, a second vacuum gauge 13, a third vacuum gauge 14 and a fourth vacuum gauge 15. The first vacuum gauge 12 is arranged in the pipeline between the vacuum chamber 1 and the vent pipe 9. Above, the second vacuum gauge 13 is arranged on the pipeline between the maintenance pump 11 and the diffusion pump 5, and the third vacuum gauge 14 and the fourth vacuum gauge 15 are arranged on the pipeline between the vacuum chamber 1 and the diffusion pump 5.


The mechanical pump 2, the first roots pump 3, the second roots pump 4, the diffusion pump 5, the maintenance pump 11, the first valve 6, the second valve 7, the third valve 8 and the air release valve 10 are respectively connected and Controlled by PLC control system. The first vacuum gauge 12, the second vacuum gauge 13, the third vacuum gauge 14 and the fourth vacuum gauge 15 are respectively connected to the signal input end of the PLC control system.


   The diffusion pump 5 is equipped with a power regulator 16, and the power regulator 16 is connected to and controlled by a PLC control system.


  The working principle of this utility model is briefly described as follows:


When vacuuming, the PLC control system controls the first valve 6 to open, and at the same time, controls the mechanical pump 2, the first roots pump 3, and the second roots pump 4 to start pre-evacuating the vacuum chamber 1. At the same time, the PLC control system Control the diffusion pump 5 to start. When the pressure in the vacuum chamber 1 reaches 3-5 Pa, the PLC control system controls the second valve 7 and the third valve 8 to open, and the diffusion pump 5 is used to vacuum the vacuum chamber 1. During the vacuuming process, when the pumping effect of the diffusion pump 5 reaches the PLC setting value, the PLC control system controls the power of the diffusion pump 5 to decrease through the power regulator 16. When the pumping effect of the diffusion pump 5 is lower than the PLC setting value, The PLC control system controls the power of the diffusion pump 5 to increase again through the power regulator 16, so as to alternate cyclically to achieve the effect of energy saving and emission reduction.


When the equipment is in a shutdown state for cleaning or maintenance, the vacuum chamber 1 no longer needs to be vacuumed. The PLC control system controls the mechanical pump 2, the first roots pump 3 and the second roots pump 4 to stop working; at the same time, control The first valve 6, the second valve 7 and the third valve 8 are closed, and the bleed valve 10 is controlled to open for bleeding; at the same time, the PLC control system controls the power of the diffusion pump 5 to drop through the power regulator 16 and keep it just Boiling state.


When vacuuming is needed again, the PLC control system controls the first valve 6 to open again, and at the same time, controls the mechanical pump 2, the first roots pump 3, and the second roots pump 4 to start pre-evacuating the vacuum chamber 1; at this time, The PLC control system controls the high-power heating of the diffusion pump 5 through the power regulator 16, so that the diffusion pump 5 quickly reaches the evacuation effect. When the pressure in the vacuum chamber 1 reaches 3-5 Pa, the PLC control system controls the second valve 7 and the third valve 8 to open, and the diffusion pump 5 is used to vacuum the vacuum chamber 1.


The utility model is equipped with a power regulator on the diffusion pump to adjust the power of the diffusion pump at any time according to the PLC setting value, which can not only realize the maintenance of the vacuum state, but also achieve the effect of saving electricity, reducing energy consumption and reducing production at the same time cost.


The above are only implementations of the present utility model, and do not limit the scope of patents of the present utility model on the other hand. Any equivalent structure made using the content of the utility model description and drawings is directly or indirectly used in other related technical fields. , The same reason is within the scope of patent protection of this utility model.


optical pvd coating equipment,vacuum coating machine 

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