Kuyamba kwa vacuum nthunzi kuyika, sputtering ndi kupaka ion

Vacuum ❖ kuyanika makamaka zikuphatikizapo zingalowe nthunzi mafunsidwe, sputtering ❖ kuyanika ndi ❖ kuyanika ion, zonse ntchito kuyika mafilimu osiyanasiyana zitsulo ndi sanali zitsulo pamwamba pa pulasitiki mbali pulasitiki ndi distillation kapena sputtering pansi zingalowe zikhalidwe, amene angathe kupeza woonda kwambiri pamwamba ❖ kuyanika ndi mwayi wapadera kwambiri adhesion kudya, koma mtengo ndi otsika mtengo ndi ntchito zitsulo, ndipo mtengo wake ndi wocheperapo ntchito, ndipo mtengo wake ndi otsika mtengo zitsulo. kupaka ntchito kwa zinthu zapamwamba kwambiri.
Vacuum nthunzi mafunsidwe ndi njira Kutenthetsa zitsulo pansi pa vacuum mkulu, kupangitsa kusungunuka, nthunzi, ndi kupanga filimu woonda zitsulo pamwamba pa chitsanzo pambuyo kuzirala, ndi makulidwe a 0.8-1.2 um. Iwo amadzaza yaing'ono concave ndi otukukira mbali mbali pamwamba pa anapanga mankhwala kupeza kalirole ngati pamwamba.Pamene zingalowe nthunzi mafunsidwe ikuchitika mwina kupeza chonyezimira galasi tingati kapena vacuum nthunzi nthunzi zitsulo ndi otsika adhesion, pansi pamwamba ayenera TACHIMATA.

Kupopera nthawi zambiri kumatanthauza kupopera kwa magnetron, komwe ndi njira yothamanga kwambiri yotsika kutentha. ndondomeko amafuna vakuyumu pafupifupi 1 × 10-3 Torr, 1.3 × 10-3Pa zingalowe boma wodzazidwa ndi inert mpweya argon (Ar), ndi pakati pulasitiki gawo lapansi (anode) ndi chandamale zitsulo (cathode) kuphatikiza mkulu-voteji mwachindunji panopa, chifukwa ma elekitironi excitation wa inert mpweya kwaiye ndi kutulutsa plasma kuphulika, producing plasma kuphulika, kutulutsa plasma kuphulika. za chandamale chachitsulo ndikuziyika pagawo lapulasitiki. Zovala zambiri zachitsulo zimagwiritsa ntchito kupopera kwa DC, pomwe zida za ceramic zosagwiritsa ntchito zimagwiritsa ntchito RF AC sputtering.

Kupaka kwa ion ndi njira yomwe kukhetsa kwa gasi kumagwiritsidwa ntchito kuti asungunuke pang'ono gasi kapena zinthu zomwe zimatuluka nthunzi pansi pa vacuum, ndipo zinthu zomwe zimatuluka nthunzi kapena zotulutsa zake zimayikidwa pagawo laling'ono pophulitsa ma ion gasi kapena ma ion a chinthu chomwe chatuluka. Izi zikuphatikizapo zokutira za magnetron sputtering ion, zokutira ion zokhazikika, zokutira za ion zotulutsa cathode (njira yopangira mpweya wa cathode), ndi zokutira za ma arc ion (zophimba cathode arc ion).

Oima mbali ziwiri maginito sputtering mosalekeza ❖ kuyanika mu mzere
Kugwiritsidwa ntchito kwakukulu, kumatha kugwiritsidwa ntchito pazinthu zamagetsi monga zolemba zotchingira zipolopolo za EMI zotchingira, zinthu zathyathyathya, komanso zinthu zonse za kapu ya nyali zomwe zili mumsinkhu winawake zimatha kupangidwa. Kukweza kwakukulu, kutsekereza kophatikizika ndi kukanikizira kotsamira kwa makapu opepuka opaka mbali ziwiri, omwe amatha kukweza kwambiri. Ubwino wokhazikika, kusasinthasintha kwabwino kwa filimu yosanjikiza kuchokera pagulu kupita pagulu. Madigiri apamwamba a automation komanso mtengo wotsika wantchito.

-Nkhaniyi yatulutsidwa ndiwopanga makina opangira vacuumGuangdong Zhenhua