Ukadaulo wa CVD umachokera pazamankhwala. Momwe ma reactants ali ndi mpweya ndipo chimodzi mwazinthuzo chimakhala cholimba nthawi zambiri chimatchedwa CVD reaction, chifukwa chake makina ake amachitidwe amayenera kukwaniritsa zinthu zitatu zotsatirazi.
(1) Pa kutentha kwa kutentha, ma reactants ayenera kukhala ndi mpweya wokwanira wa nthunzi. Ngati reactants onse mpweya kutentha firiji, ndi mafunsidwe chipangizo ndi yosavuta, ngati reactants ndi kosakhazikika pa firiji yaing'ono kwambiri, ayenera kutenthedwa kuti kusakhazikika, ndipo nthawi zina ayenera kugwiritsa ntchito mpweya chonyamulira kuti abweretse ku chipinda anachita.
(2) Pazinthu zomwe zimapangidwira, zinthu zonse ziyenera kukhala mu mpweya wa gasi kupatulapo gawo lomwe mukufuna, lomwe liri lolimba.
(3) Mphamvu ya nthunzi ya filimu yoyikidwayo iyenera kukhala yotsika kwambiri kuti filimuyo isungidweyo imangiriridwa mwamphamvu ku gawo lapansi lomwe lili ndi kutentha kwapadera panthawi yomwe filimuyo imayikidwa. Kuthamanga kwa nthunzi wa gawo lapansi pa kutentha kwa malo kuyeneranso kukhala kochepa mokwanira.
The deposition reactants amagawidwa m'magulu atatu otsatirawa.
(1) Kukhala ndi mpweya. Zida zoyambira zomwe zimakhala ndi mpweya kutentha kwa firiji, monga methane, carbon dioxide, ammonia, chlorine, ndi zina zotero, zomwe zimathandiza kwambiri kuti pakhale mpweya wamankhwala, komanso zomwe zimayendetsa mosavuta.
(2) Madzi. Zinthu zina zomwe zimachitikira kutentha kwa firiji kapena kutentha pang'ono, pali mphamvu ya nthunzi yambiri, monga TiCI4, SiCl4, CH3SiCl3, ndi zina zotero, zingagwiritsidwe ntchito kunyamula mpweya (monga H2, N2, Ar) ukuyenda pamwamba pa madzi kapena madzi mkati mwa kuwira, ndiyeno kunyamula nthunzi zodzaza za chinthucho kupita ku studio.
(3) Dziko lokhazikika. Popanda mpweya wabwino kapena gwero lamadzimadzi, zakudya zolimbitsa thupi zokha zitha kugwiritsidwa ntchito. Zinthu zina kapena zophatikizika zawo pamadigiri mazanamazana zimakhala ndi mphamvu ya nthunzi yochuluka, monga TaCl5, Nbcl5, ZrCl4, ndi zina zotero, zitha kunyamulidwa ku studio pogwiritsa ntchito mpweya wonyamulira woyikidwa mu filimu wosanjikiza.
Zomwe zimachitika nthawi zambiri zimatengera mpweya wina ndi gwero la gasi-olimba kapena mpweya wamadzimadzi, mapangidwe agasi oyenerera ku studio. Mwachitsanzo, HCl gasi ndi zitsulo Ga zimachita kupanga gawo la gaseous GaCl, lomwe limatumizidwa ku studio ngati GaCl.
-Nkhaniyi yatulutsidwa ndiwopanga makina opangira vacuumGuangdong Zhenhua
Nthawi yotumiza: Nov-16-2023