microstructure and mechanical properties of hafnium carbide coatings synthesized by reactive magnetron sputtering.
A mixture of reactive magnetic sputtering. Energy-dispersive X-ray, X-
The microstructure and mechanical properties of X-ray diffraction, scanning electron microscopy, atomic force microscopy and nanoindentation were characterized. The impact [C. sub. 2][H. sub. 2]
The effects of local pressure on the composition, phase, microstructure and mechanical properties of the coating were studied.
The results show that the carbide coating can be synchronized in size at a low pressure [C. sub. 2][H. sub. 2]. Thesingle-
When the ratio of [is] obtained phase HFCs coating with cylindrical crystal and good mechanical propertiesC. sub. 2][H. sub. 2]
Pressure is only about Level 3.
In the mixture of 0%, the highest hardness and modulus are 27.
GPa was 9 and 255, respectively.
The coating contains metal hf and HFCs phases to obtain low hardness at lower [C. sub. 2][H. sub. 2]
Bias. When the [C. sub. 2][H. sub. 2]
The greater the pressure, the greater the hardness and elastic modulus of the coating.
Carbide, hard coating, microstructure, mechanical properties, RF sputtering, transition metal carbide with high hardness play an important role in Surface Engineering. (1), (2)
The successful application of nitrogen-titanium coating opened the \"Golden revolution\" in the tool field in the 1970 s, which effectively promoted the development of automation and large-scale production in manufacturing industry.
Other nitrogen oxide coatings, such as chromium nitrogen compounds ,(3)
Zirconium nitrogen ,(4)
And titanium aluminum nitrogen ,(5)
With outstanding property.
The emergence of these materials provides a wider choice for meeting different processing requirements.
Compared with carbide, carbide has many excellent properties, especially higher hardness.
However, due to its relatively complex structure and synthesis processes, the development of these promising materials is limited.
So far, only a few carbide coatings such as titanium carbide and titanium carbon nitrogen (2)
It has been studied and used in cutting tools.
Hf carbide coating with high hardness, good wear resistance, good corrosion resistance, low thermal conductivity, is used for high
Temperature application. (6)
So far, however, few researchers have focused on the HFCs coating.
According to Ferro and others. (7)
The hardness of the HFCs coating deposited by pulse laser depends on the thickness of the coating.
When the coating thickness is about 650 nm, the hardness reaches a maximum of 29 GPa.
In the study of Teghil et al. , (8)
The HFCs coating was synthesized by the same method as filo.
The results show that the microstructure of the HFCs coating is a column crystal with a hardness of 18-
29 GPa, compared with most of the HFCs.
However, there is no detailed relationship between the two studies, including composition, microstructure and mechanical properties.
In this paper, a series of carbon carbide coatings with different carbon contents were synthesized by reactive magnetic sputtering method, and different [C. sub. 2][H. sub. 2]
The composition, phase, microstructure and mechanical properties of the coating were studied.
The experiment described in detail the synthesis of a series of hf carbide coatings with different carbon contents on anelva spc-by reaction sputtering method350multi-
Target control system. The 3-in.
Target diameter (99. 9% in purity)
Controlled by RF cathode.
The mirror polished stainless steel substrate is cleaned by ultrasonic wave in acetone and alcohol and then installed on the base plate bracket.
The distance between the target surface and the substrate is 5 cm.
When the background pressure reaches below 1. 0 x [10. sup. -3]Pa, Ar(99. 999% in purity)and [C. sub. 2][H. sub. 2](99. 9% in purity)
We were brought into the room alone.
The total pressure of the future [
Mathematical expressions that cannot be reproduced in ASCII]was kept at6. 0 x [10. sup. -1]pa while [C. sub. 2][H. sub. 2]
Mathematical expressions that cannot be reproduced in ASCII]varied from 5. 0 x[10. sup. -3]to 3. 0 x [10. sup. -2]Pa.
During the deposition process, the target power is maintained at 150 W, and the deposition time for each sample is 45 minutes.
There is no heating and deliberate bias voltage applied to these substrates.
Phase Composition of carbide coating was determined by x-
Ray diffraction (XRD)on the Dmax-
2550/PC diffraction with cu-[K. sub. [alpha]]
The growth structure and chemical composition were characterized by 200-field scanning electron microscopy (SEM)
And the Oxford quantitative energy dispersion X-ray analysis (EDX), respectively.
Observing the surface morphology of the coating using a nano-microscope iiia atomic force microscope (AFM).
Mechanical properties including Vicker hardness (HV)
Elastic modulus (E)
All coatings were measured on FischerscopeH100 VP nano indentor.
In order to obtain a reliable mechanical paint, the maximum load mN for one month is used to measure based on two
Step by step (9)
The modulus was calculated by oliver method. (10)
The hardness and elastic modulus of each sample are measured at least 20 times on average.
Results and discussions on the composition and microstructure of carbide coatings obtained in different [C. sub. 2][H. sub. 2]
The sub-pressures analyzed through EDX are listed in Table 1.
The results show that ,[C. sub. 2][H. sub. 2]
The distribution pressure is very low in the synthesis of the carbide coating by reactive magnetic control sputtering. When the [C. sub. 2][H. sub. 2]
The pressure is less than 1. 0 x [10. sup. -2]
Pa, the carbon content is less than 34. 5 at. %. As the [C. sub. 2][H. sub. 2]
Part of the pressure is between 1. 5 x [10. sup. -2]Pa and 2. 0 x [10. sup. -2]
Pa, carbon content is between 48. 5 and 56. 9 at.
%, Close to the chemical metering ratio of HFCs.
Further increase [C. sub. 2][H. sub. 2]
The pressure is above Level 2. 5 x [10. sup. -2]
When Pa, the carbon content increased rapidly to more than 70. %.
Figure 1 shows the X-ray spectrum of hf carbide coatings with different carbon contents. 1.
The carbon content is in samples 1 and 2 below 34. 5 at.
At %, there are two mixing phases of Hf and HFCs in the coating.
The metal Hf peak is very sharp, and the HFCs peak is very low.
X-ray diffraction patterns of samples 3 and 4 found a set of HFCs peaks (about 50 at. % C). Not only the (111)
The peak is sharp, others such (200), (220), and (311)
It is also clear, but relatively low, which indicates that the coating contains inconspicuous (111)texture.
Once bon arbon content exceeds 70. % (Samples 5 and 6)
The peak of HFCs gradually widened and the crystal was poor.
Especially in sample 6, there is only one widening (111)
Shows the peak of the transition of the coating to amorphous. [
Figure 1 slightly]
Further study chart
1. Found it (111)
As the carbon content increases, the peaks of the HFCs have a tendency to move towards a lower angle, which may correspond to the increased lattice constant. Insub-
With the increase of carbon content, the lattice constant of the lattice integrity of the HFCs increases; while in over-
Chemometric HFCs increase the lattice constant due to the dissolution of carbon atoms in the lattice gap position.
Figure 2 shows the crossover
Segmented fracture Microphotograph of the coating.
Cylindrical crystals are found in Hf and HFCs coexistence coatings (Fig. 2a, sample 1).
With the increase of carbon content, more obvious cylindrical crystals appear inphase coating (Fig. 2b, sample 4).
When the carbon content exceeds 70.
%, Non-Crystal fracture was observed, replacing cylindrical fracture (Fig. 2c, sample 6).
The transformation of this growth structure is related to the presence of non-crystalline phases. [
In addition, the SEM diagram shows that the thickness of the coating does not change much as the carbon content increases.
This shows that the deposition rate of the coating is rarely dependent on the proportion [C. sub. 2][H. sub. 2]in the mixture.
Although the proportion [C. sub. 2][H. sub. 2]
The composition and growth structure were significantly affected, there was no \"target poison\" phenomenon, and the sputtering rate was significantly reduced when the reaction gas pressure was high.
Surface Morphology and corresponding roughness ([R. sub. q])
The display obtained from AFM is shown in the figure. 3. In Fig.
3a, compact cell structure with roughness of 7.
15 nm is shown in Hf and HFCs coexistence coatings (sample 1).
With the increase of carbon content, single-
The phase HFCs coating also shows a compact honeycomb structure with a slight increase in roughness to 8.
19 nm in sample 4 (Fig. 3b).
However, once non-crystalline phase occurs due to excessive carbon content, the coating shows a smooth growth form with a roughness of only 4.
56 nm in sample 6 (Fig. 3c). [
Figure 3 slightly]
Figure 4 shows the change of hardness and elastic modulus of the coating with carbon content.
Hardness and elastic modulus of both
22-phase coating. 9 at. % C are only 8.
3 and 160 GPa, respectively, due to the excess metal nium phase in the coating.
The carbon content increased to 56. 9 at. %, the single-
The peak hardness and elastic modulus of the phase HFCs coating reach 27. 9 and 255GPa.
With the further increase of carbon content, it reached more than 70.
At %, the hardness and elastic modulus of the amorphous coating decreased significantly. [
Figure 4 slightly]
Conclusion The carbide coating can be synthesized by reactive magnetic sputtering in Ar and [C. sub. 2][H. sub. 2]
Easy to mix.
The position, phase, microstructure and corresponding mechanical properties of the coating show sensitivity to [local] pressureC. sub. 2][H. sub. 2]. The single-
When the ratio of [the], the phase HFCs coating with Columbia crystal and good hardness was obtainedC. sub. 2][H. sub. 2]
The pressure is only about 3.
0% in the mixture.
The most optimistic about hardness and modulus is 27.
GPa was 9 and 255, respectively.
The coating composed of Hf and HFCs phase obtains a lower hardness at a lower [C. sub. 2][H. sub. 2]
Bias. When the[C. sub. 2][H. sub. 2]
The greater the local pressure, the hardness and elastic modulus of the obtained amorphous coating decreased significantly.
The study was supported by the National Science and Technology Support Program (no. 2008BAF32B06). References (1. )
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