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Method of leakage rate measurement by vacuum ion coating equipment

Method of leakage rate measurement by vacuum ion coating equipment

2020-10-29

Method of leakage rate measurement by vacuum ion coating equipment

Under pressurized conditions, there are bubble method, helium mass spectrometer leak detector method, halogen leak detector method, ammonia leak detector method, gas sensitive semiconductor leak detector method, ultrasonic method, etc. to measure the leak rate of vacuum ion coating equipment components.


vacuum coating machine







The vacuum system of a vacuum coating machine includes a suction mechanism connected with a vacuum chamber through a pipeline, a vacuum detection mechanism and a PLC control system; the evacuation mechanism includes a mechanical pump, a first roots pump, a second roots pump and a diffusion pump, wherein the mechanical pump, the first roots pump and the second roots pump are sequentially connected with the vacuum chamber through the pipeline, forming a line leading from the pump body to the vacuum chamber The mechanical pump, the first roots pump and the diffusion pump are sequentially connected with the vacuum chamber through pipes to form a vacuum pumping air path from the pump body to the vacuum chamber, and a first valve is arranged on the pipeline between the first roots pump and the second roots pump, a second valve is arranged on the pipeline between the first roots pump and the diffusion pump, and the diffusion pump and the vacuum are arranged A third valve is arranged on the pipe between the chambers; a vent pipe is arranged on the pipe between the second roots pump and the vacuum chamber, and a vent valve is installed on the pipe; the diffusion pump is connected with a maintenance pump through a pipeline; the vacuum detection mechanism includes a first vacuum gauge, a second vacuum gauge, a third vacuum gauge and a fourth vacuum gauge, wherein the first vacuum gauge is arranged in the vacuum chamber and the air release On the pipeline between the pipes, the second vacuum gauge is arranged on the pipe between the maintenance pump and the diffusion pump, and the third vacuum gauge and the fourth vacuum gauge are arranged on the pipeline between the vacuum chamber and the diffusion pump; the mechanical pump, the first roots pump, the second roots pump, the diffusion pump, the maintenance pump, the first valve, the second valve, the third valve and the vent valve are respectively connected and controlled by the PLC control system The first vacuum gauge, the second vacuum gauge, the third vacuum gauge and the fourth vacuum gauge are respectively connected with the signal input end of the PLC control system; the diffusion pump is equipped with a power regulator, and the power regulator is connected and controlled by the PLC control system.

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