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Method for manufacturing vacuum chamber of vacuum coating machine

Method for manufacturing vacuum chamber of vacuum coating machine

2020-09-19

Method for manufacturing vacuum chamber of vacuum coating machine


Background technique:


The principle of sputtering coating is that under the action of the electric field, the plasma generated by the rare gas in the abnormal glow discharge bombards the surface of the cathode target, sputtering out the molecules, atoms, ions, and electrons on the target surface. The ejected particles have a certain kinetic energy, and are projected toward the surface of the substrate in a certain direction to form a coating on the surface of the substrate.


At present, the sputtering of the target material inside the vacuum chamber cannot be eliminated. The maximum effective adsorption area for the target material sputtered by the target material is the internal surface of the vacuum chamber and the shielding plate. The long-term target sputtering will inevitably produce The target material on the surface of the shielding plate is accumulated. When the target material accumulated on the shielding plate reaches a certain thickness, the shielding plate needs to be cleaned; in the prior art, the structure of the shielding plate inside the vacuum chamber is flat, and the flat structure is used for shielding Plate, the target material accumulated in the planar structure is less, and frequent maintenance and cleaning are required, which reduces the utilization efficiency of the vacuum coating machine.


  Technology realization factors:


  An object of the present invention is to solve at least the above-mentioned problems and/or deficiencies, and to provide at least the advantages described later.


  In order to achieve these objectives and other advantages according to the present invention, a vacuum chamber for a vacuum coating machine is provided, including:


  Vacuum chamber;


   wavy shield, which can be detachably connected to the inner wall of the vacuum chamber;


   the main drive roller, which is arranged in the center of the lower part of the vacuum chamber; the unwinding roller and the winding roller are symmetrically arranged on the upper part of the vacuum chamber;


  Three coating targets, which are placed equidistantly around the outer circle of the main driving roller, and located below the main driving roller.


   Preferably, the laying surface of the wave-shaped shielding plate on the inner wall of the vacuum chamber matches the inner wall of the vacuum chamber.


   Preferably, the detachable connection between the wave-shaped shielding plate and the inner wall of the vacuum chamber is a bolt connection.


Preferably, the detachable connection between the wave-shaped shielding plate and the inner wall of the vacuum chamber is as follows: a bending part is provided at the end of the wave-shaped shielding plate, and the inner wall of the vacuum chamber is provided with A card slot matched with the bending part, and the card slot and the bending part are matched and connected to realize the detachable connection of the wave-shaped shielding plate and the inner wall of the vacuum chamber.


   Preferably, the vacuum cavity is provided with a suction hole for connecting a vacuum pumping unit and an inflation hole for connecting an inflation system.


   Preferably, it further includes a guide roller, which is arranged in the vacuum chamber, and the guide roller is respectively located between the main driving roller and the unwinding roller, and between the main driving roller and the winding roller.


The utility model at least includes the following beneficial effects: the utility model sets the shielding baffle inside the vacuum chamber as a wave-shaped shielding baffle, which effectively increases the overall area of the baffle, allowing the baffle to absorb more targets better and Material, reduce the frequency of maintenance, thereby increasing the effective production time of the equipment.


  Other advantages, objectives and features of the present utility model will be partly embodied by the following description, and partly will be understood by those skilled in the art through the research and practice of the present utility model.


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