Industry information

Home  > INFO CENTER  > Industry information  > 

Mass spectrometer for residual gas analysis in vacuum coating equipment

Mass spectrometer for residual gas analysis in vacuum coating equipment

2020-09-05

Mass spectrometer for residual gas analysis in vacuum coating equipment

PVD vacuum coating machine

The mass spectrometers used for residual gas analysis in vacuum coating equipment can all use H, He, Ar, etc. as leak detection materials for leak detection, but the leak detection sensitivity of these leak detectors is different. Since the 1940s, the application of mass spectrometers in leak detection has further advanced the development of leak detection technology. The evaluation of a helium mass spectrometer leak detector requires a comprehensive understanding of its main performance indicators. Sensitivity is the main parameter of a helium mass spectrometer leak detector. As the sensitivity of a helium mass spectrometer leak detector is inconsistent in various countries in the world, in my country, Basically, the minimum detectable leak rate is used to express the sensitivity of a helium mass spectrometer leak detector.





Daily maintenance of evaporation coater:

1. A bad sign was found in the routine maintenance of production equipment, and it was solved immediately. The coating machine should not think that the oil should be replaced regularly, waiting for maintenance time, and the rotor pump may be seriously worn. For example, some parts of the bearing are jammed to rotate the frame, replace the bearing, and then wait until it is completely broken, which is really a big problem. The coating machine may cause the frame motor to burn down.

2 regular maintenance, coating machine someone will ask a routine maintenance also need regular maintenance? In fact, each equipment has its own life, such as 2 years of service life of oil diffusion pump, replacement ahead of time, and the coating machine has no problem in the production stage. As long as you put routine maintenance and regular maintenance, the service life of the equipment is extended at the same time, the failure probability in the production process is greatly reduced, and the production efficiency is improved. 3. Do not disassemble blindly. Problems with the vacuum part of the coater are difficult, while many companies do not leak the detector and will gradually find out. Why not to vacuum may have the following points: 1. Maybe it is the leakage rate, which is often called leakage; 2. The pumping capacity of the vacuum unit is not enough, pollution or oxidation; 2;

It may be that a vacuum chamber is too dirty air; the coating machine leaks water; 4 vacuum chamber;

Four times of pipeline leakage; or possible. The first problem is judgment, right? Demolition? Will it leak? Valve opening? According to the phenomenon judgment, and then according to the judgment to find the problem, we can get twice the result with half the effort.

Develop good health habits. The dust removal equipment and surrounding equipment of the coating machine, and the petroleum equipment itself is quite large. Dust will produce static electricity and damage electronic components. The oil can make the wire tube quenched and cracked, leading to some unexpected problems. The vacuum equipment we use, the vacuum equipment and its own particularity. Vacuum equipment, pay attention to sanitation is a vacuum, vacuum degree is poor, deflation is more.


Chat Online 编辑模式下无法使用
Chat Online inputting...