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Manufacturing method of aluminum oxide vacuum coating machine

Manufacturing method of aluminum oxide vacuum coating machine

2020-09-19

Manufacturing method of aluminum oxide vacuum coating machine


PVD vacuum coating machine

In a vacuum environment, the technique of heating and plating the material on the substrate is vacuum evaporation. Specifically, vacuum evaporation is a process in which the material to be formed into a film is placed in a vacuum for evaporation or sublimation, so that it is deposited on the surface of the workpiece or substrate. The metal coating in vacuum evaporation is usually an aluminum film, but other metals can also be formed by evaporation. However, the existing coating machine has a relatively complicated structure and high cost, which cannot fully meet the requirements of industrial production, and is not conducive to reducing the cost of coating products.


   In view of this, it is necessary to propose further solutions to the above problems.


  Technology realization factors:


  The purpose of this utility model is to provide an aluminum oxide vacuum coating machine to overcome the shortcomings in the prior art.


  In order to achieve the purpose of the above utility model, the utility model provides an aluminum oxide vacuum coating machine, which includes: a vacuum box, a coating drum, a baffle, a nitrogen delivery mechanism, an oxygen delivery mechanism, and an aluminum source;


The coating drum, baffle, nitrogen delivery mechanism, oxygen delivery mechanism and aluminum source are located inside the vacuum box. The baffles are distributed on both sides of the coating drum, and the coating drum is partially blocked from both sides. The space between the plates extends, the aluminum source is located below the coating drum, the space between the aluminum source and the coating drum forms an evaporation space, the nitrogen delivery mechanism has a nitrogen delivery port, and the oxygen The conveying mechanism has an oxygen conveying port, and the nitrogen conveying port and the oxygen conveying port are arranged toward the vapor deposition space.


As an improvement of the aluminum oxide vacuum coating machine of the present invention, there is a gap between the coating drum and the baffles on both sides, and the size of the gap is larger than the thickness of the substrate wound on the coating drum and the coating layer on the substrate Sum.


  As an improvement of the aluminum oxide vacuum coating machine of the present invention, the substrate is a plastic substrate.


  As an improvement of the aluminum oxide vacuum coating machine of the present invention, the plastic substrate is one of PET, CPP and OPP. As an improvement of the aluminum oxide vacuum coating machine of the present invention, the nitrogen delivery mechanism includes a nitrogen delivery pipeline and a first control valve arranged on the nitrogen delivery pipeline, and the nitrogen delivery port of the nitrogen delivery pipeline faces the vaporizer. Plating space settings.


As an improvement of the aluminum oxide vacuum coating machine of the present invention, the oxygen delivery mechanism includes an oxygen delivery pipeline and a second control valve arranged on the oxygen delivery pipeline, and the oxygen delivery port of the oxygen delivery pipeline faces the vaporizer. Plating space settings.


   As an improvement of the aluminum oxide vacuum coating machine of the present invention, the aluminum oxide vacuum coating machine further includes an evaporation boat, the evaporation boat is located under the coating drum, and the aluminum source is placed in the evaporation boat.


  As an improvement of the aluminum oxide vacuum coating machine of the present invention, the evaporation temperature of the evaporation boat is 1700°C to 1800°C, and the coating drum is a low temperature coating drum.


  As an improvement of the aluminum oxide vacuum coating machine of the present invention, the aluminum source is aluminum wire.


Compared with the prior art, the beneficial effect of the present invention is that the aluminum oxide vacuum coating machine of the present invention realizes the vapor deposition of aluminum oxide by providing a nitrogen conveying mechanism and an oxygen conveying mechanism. It has a simple structure and high production efficiency. Advantages, help reduce the cost of coating products.


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